Established in 2013, Shandong Liguan Microelectronics Equipment Co, Ltd. is a national high-tech company. After ten years of development, it has become a leading manufacturer of semiconductor process equipment in China, which mainly engaged in research and development, production, sales and specialized technical services of semiconductor special equipments.
The company always adheres to the scientific development concept of "scientific and technological innovation is the primary productive force", closely links the company development path with the technical research and development strength, and provides customers with high-quality products and perfect services to go forward towards internationalization and modernization.
The products are widely used in the manufacturing fields of new electronic devices such as integrated circuits, power semiconductors, compound semiconductors, 5G chips, optical communications, MEMS, etc., which are committed to the revitalization and development of semiconductor equipment industry.
Main products
First generation semiconductor equipments: LPCVD, PECVD, oxidation/diffusion equipment, LPE epitaxial equipment, vacuum annealing equipment, heater.
Third generation semiconductor equipments: HVPE single crystal growth equipment, PVT single crystal growth equipment, SiC seed crystal bonding equipment, MPCVD equipment, SiC high temperature oxidation equipment, SiC high temperature annealing equipment.
Crystal equipments: Crystal lifting equipment, crucible lowering equipment.
Graphene equipments: graphene film CVD equipment, graphene roll-to-roll equipment.