Overview
厦门韫茂科技有限公司成立于2018年，团队成员拥有丰富的薄膜沉积工艺及设备开发产业化经验。公司目前已拥有各类专利技术近50项，入选国家级高新技术企业及厦门专精特新技术企业。
韫茂科技专注于锂电池、光伏、Mini/Micro LED、先进光学、碳化硅、集成电路、超导材料和器件等领域薄膜沉积设备的研发与生产，目前已形成了以ALD原子层成膜
系统、PVD物理气相沉积系统、CVD 化学气相系统、Epitaxy外延炉等一系列薄膜沉积设备为核心的产品矩阵。
Xiamen Yunmao Technology Co., Ltd. was founded in 2018, the team members have a lot of experience in thin film deposition process. The company
currently has nearly 50 patented technologies of different kinds. It is selected as a national high-tech enterprise and a Specialized, Refined, Differential, and
Innovative Technology Enterprise in Xiamen.
Yunmao Technology focuses on lithium batteries, photovoltaics, Mini/Micro LEDs, advanced optics, silicon carbide, integrated circuits, quantum computing,
and R&D and production of frontier pan-semiconductor and new energy thin film deposition equipment. Currently, a product matrix with the core of a series ofthin film deposition equipment has been formed, such as Atomic Layer Deposition (ALD) System, Physical Vapor Deposition (PVD) System, Chemical Vapor
Deposition (CVD) System and Epitaxy epitaxial furnace.