MFC是用于控制气体质量流量的零部件。在半导体制造、光伏能源、真空镀膜等领域，对气体流量的精准控制至关重要，元创流体的MFC产品凭借其卓越的性能和可靠性，成为您的理想选择。元创流体的V系列双阀压降式MFC主要用于半导体前段制程设备，可为有国产化需求的客户提供高精度（±0.5%S.P.）、快响应（≤100ms）的产品选择，V系列的氢氟酸高温MFC已送样国内头部设备厂测试；P系列单阀压差式MFC适用于中流量测量，可实现≤300ms的快速响应，控制精度比肩业界Tier 1产品（±1% S.P.）；T系列热式MFC专为半导体行业开发，采用了自研的低热电磁阀及压力传感技术，支持6种通讯协议，可选配压力非敏，性能看齐业界高端热式MFC产品；E系列热式MFC是元创流体为非半导体行业提供的高性价比解决方案，应用成熟、稳定出货，可支持约440种气体及120℃高温应用定制。
The MFC (Mass Flow Controller) is a component designed to regulate the mass flow rate of gases. In industries such as semiconductor, photovoltaic, and coating, precise control of gas flow is paramount. Vital Oricraft's MFC products, with their exceptional performance and reliability, stand as our customers' ideal choice.
Vital Oricraft's V Series Dual-Valve Pressure Drop MFC is primarily utilized in semiconductor front-end process equipment, offering customers with localization needs high-precision (±0.5% S.P.) and fast-response (≤100ms) product options. The V Series' high-temperature hydrofluoric acid MFC is testing in Chinese leading OEM. The P Series Differential Pressure MFC is suitable for medium flow measurement, achieving a rapid response of ≤300ms and a control precision on par with Tier 1 industry products (±1% S.P.).
The T Series Thermal MFC, specifically developed for the semiconductor industry, incorporates self-developed low exothermic solenoid valves and pressure sensing technology, supports 6 communication protocols, and offers pressure insensitivity option, with performance comparable to high-end thermal MFC products in the industry. The E Series Thermal MFC is Vital Oricraft’s cost-effective solution for non-semi industries, featuring mature applications and stable deliveries, and can support 440 types of gases and high-temperature applications up to 120℃.