Dezhi Product Range: CVD@SiC coating series / Solid SiC series / Sin@SiC-SiC series / CVD@TaC coating series.
Dezhi advanced material products cover carbon-based, ceramic and other high-end materials, used in all aspects of semiconductor chip manufacturing, such as single crystal growth, epitaxy, etching, diffusion, CVD, PVD, etc.
Product performance:

High Temperature Resistance
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High Pressure Resistance
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Wear Resistance
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High Service Life
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Corrosion Resistance
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High Purity
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Application Scenarios
Wafer Fabrication
Implementation Technology
• Precision Machining (Graphite)
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• Low Pressure Chemical Vapor Deposition
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Performance Requirements
• High density
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• Strong combination
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• High purity
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• High thermal conductivity
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• Corrosion resistance
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• Resistance to cracking
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Application Areas
• LED Photoelectric
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• Integrated circuits
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• Third-generation semiconductors
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