IBS - Ion Beam Services

  • Booth: 5431

IBS, Total Ion Implantation Solution

Overview

Fabrication Division: -Custom Ion Implantation: Silicon wafer processing, Compounds processing and R&D projects -Foundry services: single step to complete processing (oxidation,diffusion,deposition,etching,photolithography,…) for product prototyping or low volume -Process Development & Consulting Equipment Division (New/Refurbished Tool): - IMC 200 & IHC Ion Implanter, full customizable -Implant Chamber Extension for beamlines -PULSion, Plasma Ion Immersion Implanter (USJ, Trench doping, Solar cells...) and Laser Annealing -Equipment refurbishment, installation & start-up +warranty: Ion implanter, Etching and Deposition tools Equipment Division (Services/Support): -Equipment maintenance, service contracts -Electronics repair shop -Sub-Assy Cleaning & Refurbishment (ion sources, graphite parts,bushing,disk, pads, ESC chucks,spindle...) -Engineering: Upgrades & Retrofits (Gas module,Monitor,Enhanced source...) -Spare parts and Consumables -Consulting and Training