IBS, Total Ion Implantation Solution
Overview
Fabrication Division:
-Custom Ion Implantation: Silicon wafer processing, Compounds processing and R&D projects
-Foundry services: single step to complete processing (oxidation,diffusion,deposition,etching,photolithography,…) for product prototyping or low volume
-Process Development & Consulting
Equipment Division (New/Refurbished Tool):
- IMC 200 & IHC Ion Implanter, full customizable
-Implant Chamber Extension for beamlines
-PULSion, Plasma Ion Immersion Implanter (USJ, Trench doping, Solar cells...) and Laser Annealing
-Equipment refurbishment, installation & start-up +warranty: Ion implanter, Etching and Deposition tools
Equipment Division (Services/Support):
-Equipment maintenance, service contracts
-Electronics repair shop
-Sub-Assy Cleaning & Refurbishment (ion sources, graphite parts,bushing,disk, pads, ESC chucks,spindle...)
-Engineering: Upgrades & Retrofits (Gas module,Monitor,Enhanced source...)
-Spare parts and Consumables
-Consulting and Training