Joinpath Materials Technology (Shanghai) Co.,ltd

上海市,  China
  • Booth: 6639

Overview

 Joinpath Group focuses on the production of high-purity fluid delivery equipment and the supply of specialty materials. The company is positioned to provide high-end products and innovative service to electronics customers with higher standards for quality and safety. Our team own more than 20+ years of experience of serving semiconductor industry. The company operates in different regions include Korea, Mainland China, Singapore and Taiwan. Our professional equipment design and manufacturing capabilities including fluid mechanics validation, process and electrical safety design. Our equipment products manufactured under clean room environment to meet semiconductor industrial standards and currently serving electronics customers globally.


  Products

  • LD200 Liquid Dispense System
    ALD & CVD precursors canister < 20L Dual process tanks design for continuous precursor supply C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2...

  • System Features & Specifications
    • ALD & CVD precursors canister < 20L
    • Dual process tanks design for continuous precursor supply
    • C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
    • Top light tower for equipment status
    • EMO for emergency shutdown
    • Semi S2 certified
    Application
    • TEOS, TEB, BDEAS, HCDS, ATRP, OMCTS, TMCTS, DIS, BTBAS, 4MS, DIPAS, TiCl4, TEPO, TMB, MDEOS, etc.
  • GD100 Compressed and Liquified Gas Delivery System
    System Features & Specifications...

    • Supply Compressed & Liquid specialty gases
    • Dual cylinder design for continuous supply
    • C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
    • Top light tower for equipment status
    • EMO for emergency shutdown
    • Semi S2 certified
    Application
    • HF, HBr, Cl2, CxFy, C3H6, CHF3, COS, DCS, WF6, SF6, AsH3, PH3, SO2, Si2H6, F2 mixture, GeH4 mixture, CO, CH4, C2H4, MMS mixture, H2 mixture, B2H6 mixture, NO, BCl3, SiH4, CF4, Inert mixtures
  • BV100 1.5L Bubbler
    System Features & Specifications...

    • Miniature design to fit in OEM tool
    • PFA valve for all wetted path
    • Operation interlock for safe operation
    • EMO for emergency shutdown
    • Level measurement with continuous level sensor + optical switch​
    • Dual overfill and low level protection ​
    • Bottom leak sensor for any potential container leakage ​
    • Over pressure protection 
    • Over-temp detection
    Application
    • DCE(Trans-LC), POCl3