Global Leader in Lithography Systems and Process Equipment！
Overview
ABM Inc. has been deeply engaged in semiconductor lithography equipment manufacturing for over 20 years. Leveraging its independently developed and manufactured G/H/I-line as well as full-spectrum DUV ultraviolet lithography systems, along with leading lithography processes, to provides core lithography process equipment support for front-end manufacturing of 200mm/300mm integrated circuits, advanced packaging, MEMS, power devices, optical communications, and other chip production.
Its core products include proximity/contact lithography machines, coat/develop equipment, and bonding equipment. ABM offers a full-chain service covering equipment R&D, process optimization, and after-sales support (including complete machine refurbishment, installation & commissioning, and spare parts supply).
Leveraging its proprietary lithography technology, the company supplies micro-nano optical devices such as FAC Lens, Micro-lens Array, and OCS lens arrays. These are widely used in CPO applications, supporting key processes including SiPh optical engine coupling, MPO/MT connector alignment, and ELS light source collimation.
ABM holds over 2,000 independent patents in lithography technology and has served more than 300 industry customers worldwide.
We look forward to meeting you at SEMICON China 2026 in Shanghai to jointly create the new future of advanced lithography manufacturing processes!
Products