MPI TS3000-DS | 300 mm Automated Probe Systems
- 300 mm semi-automatic double-side probe system
- Designed to accommodate MPI double-sided GridChuck™
- Upper probe platen for top side testing with MicroPositioners or 4.5" probe cards, incl. mounting capability for a SINGLE-SIDED ALIGNMENT SYSTEM*
- Additional lower probe platen with z-separation movement to accommodate a SINGLE-SIDED ALIGNMENT SYSTEM* for bottom optical measurements
- 310 x 400 mm chuck XY stage
- +/- 5-degree fine chuck theta rotation
- 10 mm chuck Z loading stroke
- SmartVacuum™ for automated detections of 300 mm wafer or 100 mm area for wafer shards or single-Die testing
- Integrated vibration isolation table with active load leveling
- Prober controller and MPI SENTIO® software suite
- One touchscreen monitor for multi-touch, intuitive operation
- Stable microscope bridge mount
- Integrated hardware control panel
- Integrated keyboard and mouse tray
- Universal Power cord Kit
* Both cannot work simultaneously