创实气体控制设备（上海）有限公司

Product features：
• Pressure control panel for hazardous gases and ultra high purity gases from grade 6.0
• SBE: purge- and connection block or
  SR: pigtail and single valves with
- manual waste gas valve (HPV)
- pneumatic process gas valve (HPI)
- manual purge gas valve (PGI)
• Check valve to prevent process gas from fl owing back into the purge gas line
• Pre-filter
• Pressure regulator with tied diaphragm
• Burst disc with burst disc monitoring
• Leak test port for leak test or vacuum
• Stainless steel valves for manual or automatic (pneumatic) shut-off
• Minimized purge volume (SBE)
• Electro-polished surfaces (gas wetted)
• Clearly legible handwheel position indication (on/off )
• 100 % Helium leak tested
• Assembly in clean room class ISO 5.0
• Modular design with many options

Product features:

·Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0 

·1-stage or 2-stage version available

·Metal-to-metal seal to atmosphere

·Pre-filter

·Tied diaphragm

·Minimized internal volume for short purge times

·Electro-polished surfaces (gas wetted)

·100 % Helium leak tested

·Assembly in clean room class ISO 5.0

Product features:

·Stainless steel valves for manual or automatic (pneumatic) shut-off

·Diaphragm metal-to-metal sealed to atmosphere

·Fully functional even when valves are evacuated

·Minimized internal volume for short purge times

·No parts in the gas-wetted area exposed to friction or torsional stress provide minimum particle generation

·Embedded soft seat seal made of PCTFE or PVDF permits frequent operation without loss of tightness

·Pneumatic actuator optional for line pressure 25, 100, 200 and 300 bar

·Optional with inductive proximity switch

·Variable installation position

Product features:

·Purge block for hazardous gases and ultra high purity gases from grade 6.0

·Minimized purge volume of only 2.6 cm³

·Capillary tube allows purging into the cylinder valve

·Includes diaphragm type vent valve, purge valve, and waste gas valve

·Fully functional even when valves are evacuated

·Manual diaphragm valve optional with pneumatic actuator

·Embedded soft seat seal made of PCTFE permits frequent operation without loss of tightness

Product features:

·Point of use stick for corrosive gases and gas mixtures with corrosive components from grade 6.0

·Linear layout design for easy installation

·Pressure regulator with tied diaphragm

·Manual or pneumatic valve options:
- process gas inlet (TPI)
- purge gas inlet (SPI)
- purge gas vent (SPV)
- process gas outlet (TPO)