SERVOMEX GROUP LIMITED

UNRIVALLED PERFORMANCE:

Uses industry-leading,  
high stability coulometric  sensor, with ultra-low drift
 Highly sensitive 200ppt Lower Detection Level (LDL)
Fast speed of response in  fluctuating O2 concentrations and flow conditions

uick upset recovery dry-  down avoids “running blind”when process problems occur

KEY APPLICATIONS

Quality control checks for electronics grade gases
Leak detection for electronics grade gas lines and VMB

The new DF-700 Series Gen-7 is a sophisticated trace and ultra-trace moisture analyzer range combining new digital electronics with proven sensing technology.
Designed for manufacturability and repairability, it allows for field serviceability with many components able to be replaced in the field.

Applications
DF745: Inert gases leak detection for LED and LCD plants
DF745 SGMax: Specialty gas cylinder quality control
DF749: HP bulk gases used in semiconductor applications
DF750: Bulk UHP gas CQC for semiconductor fabs
DF760E: O2 and H2O monitoring in UHP bulk gases used in semiconductor applications

Sub-ppb trace measurement of h2, ch4, co, co2, n2, ar and nmhc for the semiconductor industry Incorporating the latest advances in gas sensing technology and signal processing methodology, the NanoChrome offers optimum performance for purity measurements for the semiconductor industry.

Features and benefits
In compliance with Low Voltage, EMC and applicable Directives
Innovative Plasma Emission Detector (PED) sensor technology enables sub-ppb measurements of H2, CH4, CO, CO2, N2, Ar and NMHC
Enables unique total Servomex solution for UHP gas analysis

Applications:

Semiconductor production – quality
control measurements
Semiconductor production – stationary
analytical systems
UHP gas production – quality control
measurements