SERVOMEX GROUP LIMITED

上海市,  China
http://www.servomex.com
  • Booth: 2706

Welcome to the Servomex Booth

Overview

Servomex is the global expert in gas analysis, delivering precision solutions trusted across critical industries worldwide. Backed by more than 70 years of innovation, we develop and manufacture leading‑edge sensing technologies —from Paramagnetic and Coulometric to Laser Moisture and Plasma detection—to ensure accurate, reliable measurement in the most demanding environments. As a key partner to the semiconductor industry, Servomex gas analyzers provide ultra‑high‑purity (UHP) gas analysis essential for advanced chip production. Our latest Gen‑7 analyzers deliver ppt‑level oxygen and the lowest‑available moisture detection, while NanoChrome technology enables sub‑ppb impurity monitoring using safe, flammable‑gas‑free Plasma Emission Detection. With global centres of excellence, integrated systems expertise, and world‑class service, Servomex empowers safer, more efficient, and more productive operations for customers around the world.


  Press Releases

  • Servomex, the global expert in gas analysis, is set to highlight its advanced ultra‑high‑purity (UHP) solutions at SEMICON China 2026, reinforcing its position as a trusted partner to the semiconductor industry.

    With more than 70 years of sensing innovation, Servomex delivers industry‑leading technologies that ensure the precise control required for cutting‑edge chip manufacturing. Visitors to this year’s event will have the opportunity to explore Servomex’s latest UHP analyzers and talk to our experts: Regional Sales Managers (P&S) , Senior Application Specialist will be at Stand N2706 throughout the event to answer your gas analysis questions, and to discuss our single-supplier solution for ultra-high-purity (UHP) gas applications. Learn more about our NanoChrome ULTRA analyzer, and the SERVOPRO Gen‑7 DF‑700 moisture range and Gen‑7 DF‑500 oxygen analyzers, engineered to provide exceptional sensitivity and stability for demanding semiconductor applications. The showcased ULTRA series also offers world‑class ppt‑ and sub‑ppb‑level detection capability, supporting safer, cleaner, and more efficient fabrication environments.

    As semiconductor production continues to advance at speed, Servomex’s expertise, global support network, and proven measurement performance make it the ideal partner for customers seeking reliable, next‑generation UHP gas analysis.

    Meet our experts in person at Stand N2706, make sure you register for the exhibition now.


  Products

  • DF550E-G7 O2 analyser
    Ultra trace oxygen analyzer optimized for quality measurements in high purity electronic gases. Highly sensitive 200ppt Lower Detection Level (LDL)....

  • UNRIVALLED PERFORMANCE:

    Uses industry-leading,  
    high stability coulometric  sensor, with ultra-low drift
     Highly sensitive 200ppt Lower Detection Level (LDL)
    Fast speed of response in  fluctuating O2 concentrations and flow conditions

    uick upset recovery dry-  down avoids “running blind”when process problems occur

    KEY APPLICATIONS

    Quality control checks for electronics grade gases
    Leak detection for electronics grade gas lines and VMB

  • DF700-G7-H2O analyser
    Tunable diode laser absorption spectroscopy trace moisture analyzer range ...

  • The new DF-700 Series Gen-7 is a sophisticated trace and ultra-trace moisture analyzer range combining new digital electronics with proven sensing technology.
    Designed for manufacturability and repairability, it allows for field serviceability with many components able to be replaced in the field.

    Applications
    DF745: Inert gases leak detection for LED and LCD plants
    DF745 SGMax: Specialty gas cylinder quality control
    DF749: HP bulk gases used in semiconductor applications
    DF750: Bulk UHP gas CQC for semiconductor fabs
    DF760E: O2 and H2O monitoring in UHP bulk gases used in semiconductor applications

  • SERVOPRO-Nanochrome
    Highly versatile trace gas analyzer platform configurable to a wide range of applications...

  • Sub-ppb trace measurement of h2, ch4, co, co2, n2, ar and nmhc for the semiconductor industry Incorporating the latest advances in gas sensing technology and signal processing methodology, the NanoChrome offers optimum performance for purity measurements for the semiconductor industry.

    Features and benefits
    In compliance with Low Voltage, EMC and applicable Directives
    Innovative Plasma Emission Detector (PED) sensor technology enables sub-ppb measurements of H2, CH4, CO, CO2, N2, Ar and NMHC
    Enables unique total Servomex solution for UHP gas analysis

    Applications:

    Semiconductor production – quality
    control measurements
    Semiconductor production – stationary
    analytical systems
    UHP gas production – quality control
    measurements