Pfeiffer Vacuum (Shanghai) Co., Ltd

Shanghai,  Pudong 
China
http://www.pfeiffer-vacuum.cn
  • Booth: 3000

Complete fab solutions from cleanroom to exhaust!

Overview

Pfeiffer Vacuum+Fab Solutions supplies turbomolecular vacuum pumps, dry vacuum pumps, and measurement equipment for  applications including PVD, CVD, lithography, etch and implant processes as well as back-end applications. For inspection and metrology, we provide low-vibration vacuum solutions. Additionally, we offer leak detectors and systems for contamination management. Pfeiffer also manufactures flanges, valves, fittings and chambers as well as custom components.

Pfeiffer is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses two well-known brands: Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions.

  Products

  • ATH 4506 M/MT
    Turbomolecular vacuum pump...

    • High temperature and flow
    Wide process range, high corrosion resistance

    Self-diagnostics
    Built-in sensor for performance diagnostics, maintenance optimizations and external communications

    Economical
    Optimized temperature management, low power and cooling water consumption, low cost of ownership

  • UltiDry
    Multi-stage roots pump...

    • The UltiDry pumps are the latest innovation in sustainable technology, offering a range of advantages that will leave you amazed. 

    Designed to withstand the most challenging processes

    Engineered to enhance powder management, handle high inlet flows, withstand corrosive gases, prevent chemical reactions, and avoid condensation of byproducts, UltiDry ensures optimal performance and extends pump lifetime.

  • THERMAL OXIDIZER HYBRID (CT-TW-H)
    Electrically heated waste gas treatment system with integrated wet scrubber...

    • Selectively increased the combustion temperature via hydrogen injection to destroy PFC gases
      Flexible design in accordance with customer requirements
    • High up-time and easy to maintain
    • Low TCOO with fewer wear parts
    • Superior German manufacture quality

Categories

202 Equipment, General Use
  • Repair; Rework Equipment
  • Space simulation; Vacuum chambers
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
    • 401 Sub-systems
  • Process Monitoring systems
  • Pumps, Vacuum
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
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