Our GEN is the "heart" of the entire ozone system and the most technologically advanced part.
1. Our core competitiveness lies in design and materials. Double-sided water cooling technology makes the machine more durable and stable; high-purity ceramic discharge chamber ensures that the generated ozone is ultra-pure; and our equipment can be upgraded to nitrogen-free technology in the future to protect your investment.
2. It has extremely powerful performance . The ozone concentration can reach up to the industry's top 420g/m³ , and it is very energy-efficient . The 14 core units only require 9.5 liters/minute of cooling water . Whether it is SACVD or ALD and other precision processes, it can be perfectly matched.
3. Its foundation is very reliable , using industrial standard power supply and having passed SEMI S2 international safety certification , you can rest assured completely.