Zhuhai Zhihua Semiconductor Technology Co.,Ltd.

Zhuhai,  China
https://www.zhihuas.com/
  • Booth: T4328

Overview

Zhihua Semiconductor is a company specializing in core semiconductor components, established through the collaboration of a renowned domestic investment institution and an international top-tier semiconductor core team. With over a decade of dedicated focus on the semiconductor core components sector, the company possesses comprehensive full-chain technology development and service experience. It specializes in the field of high-end semiconductor ozone generators, mastering a complete set of independent intellectual property rights encompassing core parts, technology, software, and patents. Its products have been successfully applied in several leading wafer fabs in mainland ChinaTaiwan district , and Southeast Asia, making it one of the few specialized suppliers in China capable of fully independent development and application of ozone-related equipment in the semiconductor wafer manufacturing process .
Leveraging a strong R&D team and global supply chain resources, the company has established well-equipped assembly workshops, cleanrooms, laboratories, and testing platforms in Wuxi and Zhuhai. The total area of these facilities reaches 6,000 square meters, providing robust capabilities for both large-scale production and customized services .


  Press Releases

  • The new product line of Zhihua Semiconductor has delivered its first good news. Recently, the ultra-high purity water heating system independently developed by the company completed its first batch of production at the Zhihua Base and was officially delivered to customers.
    This marks the high-purity fluid heating product line planned by the company, which has successfully transitioned from R&D testing to monetization delivery stage.

    Why is it necessary to tackle the "heating" challenge?

    An insight originating from craftsmanship

    In high-end manufacturing such as semiconductors and photovoltaics, even the slightest difference in ultrapure water temperature directly affects process yield. Zhihua's strategic layout of the heating product line is precisely aimed at overcoming this critical "thermal management" challenge.
    The ultra-pure water heating system delivered this time adopts the full FPA ultra-clean flow path design , effectively avoiding the risk of metal ion pollution, and the temperature control accuracy reaches ± 0.1 ℃ . It has been stably applied in key links such as wafer cleaning and post-etching cleaning , aiming to provide customers with a trustworthy "temperature guard" for their production lines.

    Verify the "Zhihua Speed"

    Extend the boundaries of capabilities

    From the production line's commissioning to the completion of the first batch of deliveries, Zhihua once again demonstrated its rapid productization capabilities. This is not only the implementation of a new product but also a solid verification of the company's cross-product line system capabilities.
    According to the plan, the full range of products includingPFA online heaters, chemical solution heaters, etc.are being steadily advanced, and the company is committed to becoming a more comprehensive core component partner for customers.

    It doesn't stop there

    A more comprehensive blueprint is unfolding

    Meanwhile, our core Line of Business has also been receiving good news. Zhihua's knock-out product - Compact Ozone System (COS) and the full range of ozone products, with their technical specifications benchmarked against international standards and the advantages of localized services, have been widely recognized by the market and achieved continuous mass shipments.
    About Zhihua:
    Zhihua Semiconductor, a technology enterprise specializing in core semiconductor components. It has assembled a top-notch industry team, with over a decade of technological accumulation, and is committed to providing self-developed, reliable-performance ozone, functional water, heating, and gas treatment system solutions for the global high-end manufacturing industry.
  • The core products of Zhihua Semiconductor have entered a period of intensive delivery. Recently, multiple Compact Ozone Systems (COS) have successively completed loading and been shipped to customers across the country. Since mass production, the product has cumulatively delivered dozens of units, with market orders continuing to grow.

    Confront integration pain points

    Define "Plug and Play" gas source

    The integration of traditional ozone gas sources is complex, which is a common pain point for equipment manufacturers. The innovation of Zhihua COS lies in that it highly integrates core components such as generators, concentration meters, and controllers into a compact chassis, providing customers with standardized and intelligent "Plug and Play" modules .
    • Robust Performance: Ozone concentration can reach up to 380g/m³, with built-in closed-loop concentration control to ensure stable output.
    • Integration Friendly: Modularization design greatly simplifies customers' integration work.
    • Intelligent Control: Supportsmultiple communication protocols such as Modbus TCP and EtherCAT.

    Transcendence Parameter

    Localized Services Build a Deep Competitive Edge

    Beyond performance benchmarking against international standards,rapid-response localized serviceis a significant advantage of Zhihua. Relying on multi-location spare parts warehouses and technical service networks, we can provide24-hour rapid response, significantly reducing customer equipment downtime and effectively lowering comprehensive operating costs.

    Full-chain in-depth cultivation

    Viewing Zhihua's Ozone Technology Landscape from the Perspective of COS

    The large-scale application of COS stems from Zhihua's more than a decade of in-depth exploration of full-chain technology in the ozone field - from ozone generation, concentration detection, system integration to safety breakthrough, a complete product matrix has been formed, continuously empowering high-end manufacturing industries such as semiconductors and photovoltaics.
    About Zhihua:
    Zhihua Semiconductor, a technology enterprise specializing in core semiconductor components. It has assembled a top-notch industry team, with over a decade of technological accumulation, and is committed to providing self-developed, reliable-performance ozone, functional water, heating, and gas treatment system solutions for the global high-end manufacturing industry.

  Products

  • Ozone Generator
    Zhihua's ozone generator is an integrated top-notch discharge technology, precision digital power supply, intelligent control system, and high-purity material process into one high-tech product....

  • Our GEN is the "heart" of the entire ozone system and the most technologically advanced part.
    1. Our core competitiveness lies in design and materials. Double-sided water cooling technology makes the machine more durable and stable; high-purity ceramic discharge chamber ensures that the generated ozone is ultra-pure; and our equipment can be upgraded to nitrogen-free technology in the future to protect your investment. 
    2. It has extremely powerful performance . The ozone concentration can reach up to the industry's top  420g/m³ , and  it is very energy-efficient . The 14 core units only require  9.5 liters/minute of cooling water . Whether it is SACVD or ALD and other precision processes, it can be perfectly matched. 
    3. Its foundation is very reliable , using industrial standard power supply and having passed  SEMI S2 international safety certification , you can rest assured completely. 
  • Compact Ozone System(COS)
    A high-precision, high-stability ozone generation system ....

  • Our COS is a high-precision, high-stability ozone generation system .
    1. Its performance is very powerful and stable , with concentration fluctuations controllable at ±1g/m³ , an extremely high level, and the lifespan of its core components exceeding 5 years , making it very durable.
    2. We possess core technologies , from the current mature photocatalytic technology to the nitrogen-free next-generation technology that will enter mass production next year, maintaining continuous leadership.
    3. Quality is what we value most , with key components using top-tier brands or self-developed ones, and gas cleanliness reaching 0.1 micron <3 pieces the top level, and having passed SEMI International Safety Certification
    4. It is both highly intelligent and worry-free , supports multiple communication protocols, can integrate into smart factories, and has very few consumables in the later stage, requiring almost no maintenance