ATV Technologie GmbH

PEO-603/4 Features:

Floor space saving by small foot print/Energy saving by zero energy consumption at ambient standby/Max 100 wafer/process run/Up to 200mm Ø wafers/Multiple processes by easily exchangeable quartz In Liners/Easily exchangeable quartz In Liners/Temperature Ramping:Up to 1.000°C  within 15 minutes: down to < 100°C in less than 60 minutes/ 1K per 100 minutes (slowest ramping speed up/down)/Max. 1.100°C continuous processing/Temperature range  250°C to 1.100°C/Low temperature processing with gas preheating/Ultimate vacuum < 5 x 10-6 mbar/He leak rate: < 5 x 10-9 mbar l/s/O2 = N2 supply quality/100 steps/progra

Common Applications PEO-603/4:
CVD, PVD, LPCVD, MOCVD / Si3N4, Poly Si / Insitu doping with toxic gases / Si Epitaxy / TEOS, LTO /
Carbon Nanotubes, Si Nanowires, Graphene / Gas/Solid Source Diffusion / Wet/Dry Oxidation / Al Oxidation for VCSEL /
Trans LC / SiAl/SiAu/SiMo alloying / Annealing:Inert/noble/reactive Atmosphere: Hydrogen; High vacuum; Post Implant Annealing / Low K / Polyimide/BCB, Curing/Baking / LTCC Sintering, Thick film paste firing 

Features SRO i-Line:
High Troughput / Short cycle times / Vacuum level 10¯² mbar / Formic Acid / process temperature up tp 450°C / Temperature ramp-up rate 3K/sec. / Temperature cool-down rate 2K/sec. / Excellent temperature uniformity  / IR Heating / Small footprint (No footprint change up to 3 Process Chambers)

Common Applications SRO i-Line:

IGBT/DBC / Power Semiconductors / Sensors / MEMS Devices / DIE Attachment / High Power LED / Hybrid Assembly / Flip Chip / Package Sealing

Features SRO-706 Getter:

Maximum temperature 450°C/500°C / High vacuum capability <1 x 10-6 mbar / Package and lid separated during high vacuum getter activation / Water cooled shutters in between / Package/die temperature < 100°C while 450°C lid/window temperature / RGA data right after sealing < 4 x 10-3 mbar with getter material / RGA data long time after sealing < 4 x 10-4 mbar with getter material / Air leak rate after 30 years < 3 x 10-16 mbar l/s with getter materia

Common Applications SRO-706 Getter

Package sealing with high vacuum encapsulation / MEMS Cap/package lid sealing / Microbolometers / IR detectors / Gyroscopes / Thermal & electrical getter activation

Features PHP-630

Low Power consumption 4kW @ 1000°C // Zero % LTCC X/Y shrinkage // Heating Rate: < 70min. to 1000°C (empty chamber) // Cooling Rate: < 90min. from 1000°C  to 100°C (empty chamber) // Control range: 250°C – 1 100°C, under vacuum up to max. 1 000°C, Accuracy < ±0,5°C > 350°C // Pressure up to 50kN, 100N controlled resolution, 500N minimal pressure force // PLC based 100 step recipe program // Pneumatic driven Press assembly // In-Situ measurement for inclination angle // In-Situ shrinkage monitoring // Recipe controlled atmosphere: O2 down to N2 supply quality; > 1 mbar // Recipe controlled pressure less mode

Common Applications PHP-630

Constrained LTCC Sintering // LTCC Embossing // Glass Imprinting // Glass Embossing