Attolight AG

EPFL Innovation Park, Building D
Lausanne,  1015

  • Booth: A4567

High resolution cathodoluminescence for defect inspection

About us

Attolight build high resolution cathodoluminescence microscopes to detect subsurface defects combined with nanometer scale mapping resolution. We have applications in detecting defects in III-V manufacturing, research & development and failure analysis.

The Internet of Things, Big Data, and Clean Tech rely heavily on performance and innovation in semiconductor materials and devices. We perform quality control during their development and production and help increase performance and accelerate innovation.


- Light Emitting Diodes (LEDs)

- Displays: Specialty LED and µLED structure

- Power & radio frequency devices (GaN, SiC)

- Photonics

- Materials characterization


- Defect Detection and characterization

- Composition metrology

- Doping metrology

- Failure analysis

- Nanostructure characterization

- Carrier dynamics (picosecond time resolved CL) & dynamic SEM

 Press Releases

  • EAG Laboratories and Attolight Announce Partnership

    Partnership to Deliver Advanced Cathodoluminescence, Photoluminescence and EBIC-Scanning Electron Microscopy Analytical Services to U.S.

    EAG Laboratories, a global scientific services company that provides testing, analytical and characterization services to technology- and life-science-related industries, and Attolight AG, a manufacturer of integrated quantitative cathodoluminescence instruments have partnered to offer U.S. customers a new Measurement Service Center in Raleigh, NC.

    Cathodoluminescence is a non-destructive characterization method that provides a deeper understanding of material structures and properties than many other available techniques. The combination of electron and light microscopy reveals ultra-trace impurities and crystallographic defects not visible using other imaging techniques.  The technology is used in a variety of applications, including LED and laser performance and reliability, GaN power transistors, deep UV emitters, solar cell efficiency, plasmonics, geology and biosensors.  Additionally the tool delivered to EAG will be capable of performing integrated photoluminescence and EBIC measurements.

    “The Attolight  Allalin CL-SEM4027 is a great example of technology that enables modern industry to push the boundaries of science. It’s one more way EAG can help its customers continuously innovate and improve the reliability of their products.” said Patrick Schnabel, Ph.D., Vice-President, Advanced Imaging of EAG. “We are thrilled to add this powerful tool to EAG’s arsenal of analytical capabilities,” said Schnabel.

    “We are very pleased that EAG has selected our cutting edge, quantitative CL-SEM/EBIC system” cited Samuel Sonderegger, Attolight’s CEO and co-founder. This new instrument creates new opportunities for the photonics and materials analyses and wide range of applications EAG handles every day.”

    About EAG

    EAG, Inc. is a global scientific services company serving clients across a vast array of technology-related industries. Through multi-disciplinary expertise in the life, materials and engineering sciences, EAG helps companies innovate and improve products, ensure quality and safety, protect intellectual property and comply with evolving global regulations. EAG employs 1200+ employees in seven countries, across 20 laboratories serving more than 4,000 clients worldwide. EAG Laboratories is a wholly-owned subsidiary of Eurofins Scientific.

    About Attolight AG

    Attolight builds fully integrated cathodoluminescence systems with best-in-class collection efficiency and reproducibility. All products feature Attolight’s proprietary quantitative cathodoluminescence technology. The company’s products are used in FA laboratories, material research laboratories, and semiconductor industry. Major application fields include: R&D and reliability assessment for LEDs, lasers, power transistors, nano-electronic devices, and solar cells. The Company was founded in 2008 and is based in Lausanne, Switzerland.


  • Säntis 300
    Säntis 300 / Full wafer cathodoluminescence control up to 300mm diameter. Attolight’s Quantitative CL-SEMs offer “No Compromise” large field fast scanning simultaneous acquisition of SEM image, hyperspectral CL maps...

  • Säntis 300 / Full wafer cathodoluminescence control up to 300mm diameter

    The Säntis 300 system has been designed for fully automated control of 150, 200 and 300mm wafers.

    Attolight’s Quantitative CL-SEMs offer “No Compromise” large field fast scanning simultaneous acquisition of SEM image, hyperspectral CL maps, and optical spectra.

    Smaller diameter wafers, or miscellaneously shaped substrates are manually loaded on intermediary 300mm susceptors subsequently handled automatically by the tool.

    The Santis 300 system offers 3 distinct acquisition modes: step and repeat (S&R), continuous scanning mode (AWpix), integrative scanning mode (FWbrush)

    -           up to 300 mm wafer tool

    -           High CL-SEM throughput

    -           Simultaneous SEM imaging and Optical signature acquisition

    -           Edge detection for accurate wafer positioning (better than 10µm)

    -           Automated wafer bow mapping and correction

  • Allalin
    The Allalin is a nanometer resolution spectroscopy instrument, based on a disruptive technology known as quantitative cathodoluminescence that integrates a light microscope and a scanning electron microscope (SEM) into one tool....

  • The Allalin allows for “No Compromise” large field/fast scanning simultaneous SEM imaging with hyperspectral or panchromatic CL maps. The system was constructed from the ground up to attain the best cathodoluminescence performance without sacrificing the SEM performance: the light microscope and the objective lens of the SEM are carefully integrated so that their focal planes match each other; the light microscope is machined with sub-micrometer precision so as to an achromatic, high numerical aperture (N.A. 0.71) detection with superior photon collection efficiency over a large field of view  — up to 300µm — compared with traditional CL technologies. As a result, quantitative cathodoluminescence, where instrument related artifact can intrinsically be ruled out as an explanation for a spectral feature or a contrast, becomes conceivable for the first time.

    Key benefits

    Designed from the ground up as an integrated CL-SEM system

    • puts optical collection withinthe electron column 
    • Requires ZERO optical alignment for CL
    • Highest collection efficiency over a field of view (FOV) of 300µm
    • Ensures CL uniformity and reproducibility, making the system quantitativeas well as qualitative.Quantitative: the photon collection efficiency is constant (+- 1%) over a large FOV of 300 µm (no vignetting); a 300 µm map is performed without any displacement of the specimen: cathodoluminescence results are reproducible and comparable.
    • Uses lower beam dosages, reducing the possibility for beam damage to sensitive samples
    • Fast! Single hyperspectral CL map measurement time ranges from 18 s to 30 min compared to the competition’s 30 min – multiple hours
    • Simultaneous generation of a SEM image and a hyperspectral CL image with no degradation of the electron probe size
    • Schottky FEG for high current densities from: 30 pA to 300nA
    • Highest resolution SEM in CL mode: down to 3nm
    • Intuitive User Interface and specialized software
    • Touch screen control with easy to navigate context based GUI that does not require an expert to operate the tool
    • Dedicated Attomaphyperspectral analysis software (see separate brochure)
    • High precision nanopositioning stage with low temperature option (10K to room temperature)
    • Highly versatile: Optical hub for integration of the Attolight CL instrument in a larger spectroscopic system or complement its functionality
  • Chronos
    The Chronos is a variable temperature time-resolved nanometer resolution spectroscopy instrument that builds on the Allalin quantitative CL system. In time-resolved mode, the same gun is driven by an ultrafast laser to create short electron pulses....

  • Chronos - picosecond time-resolved cathodoluminescence (pTRCL) system

    The Chronos is a variable temperature time-resolved nanometer resolution spectroscopy instrument that builds on the Allalin quantitative CL system. In continuous operation mode, the Chronos works like the Allalin system using the same high current density Schottky field emission gun. In time-resolved mode, the same gun is driven by an ultrafast laser to create short electron pulses. Attolight’s highly efficient quantitative CL collection system is a crucial component of the Chronos since excitation currents in pulsed mode are up to thousand times less intense than in continuous mode.

    Careful synchronization of the excitation laser and the detectors makes time-resolved CL in the picosecond regime a reality. Switching between pulsed and continuous mode is automated and takes a couple of minutes, which makes the system a perfect fit for a multiuser facility where users have multiple demands and throughput is important. 

    The Chronos is built for researchers who need to access dynamic spectroscopic information with nanometer spatial and picosecond temporal resolutions. 


    The Chronos features a comprehensive set of ultrafast detectors to cover the UV to IR wavelength range and to optimize performance for your applications. The Chronos’ versatile design also makes it capable of performing advanced methods such as pump/probe spectroscopy and dynamic SEM.

    Key benefits

    • Automated switching between continuous and time-resolved mode within minutes
    • No degradation of spatial resolution when switching from continuous to pulsed mode
    • Same dedicated graphical user interface and control software as the Allalin, featuring time-resolved detectors
    • Extension to include advanced characterization techniques such as pump / probe spectroscopies or dynamic SEM
    • Large choice of detectors and detector technologies to cover the wavelength range from 200nm (UV) to 1700nm (IR)
    • Scripting functionality to automate measurements and configure the system for specific needs
    • Highest collection efficiency CL system adapted to low excitations currents in pulsed mode
    • Ultrastable helium cryostat system to work at temperatures from 10K to room temperature
    • Refer to the Allalin product description for additional benefits

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