ULVAC, a leading manufacturer of metrology- and deposition-tools, developed an innovative high-speed spectroscopic ellipsometer for many deposition applications, such as PVD, CVD, ALD and others.
This novel spectroscopic ellipsometer can measure the thickness and optical constants of thin films at a dramatically fast speed. Its data acquisition time is as short as 10 ms. It does not require any active components for polarization-control, such as a rotating compensator or an electro-optical modulator.
It creates great opportunities for new applications of the spectroscopic ellipsometry in which the compactness, simplicity, and rapid response are extremely important. The sensor head can easily be integrated into a deposition tool and successfully measure thin films in-situ and ex-situ.
For other applications, e.g. semi-conductors and solar cells, there a portable, manual, and motorized instruments available for wafer sizes up to 300 mm.