Schaefer Technologie GmbH

Robert-Bosch-Str. 31
Langen,  D-63225

Germany
http://www.schaefer-tec.com
  • Booth: A4613


Products and Solutions for your Applications

Schaefer Technologie GmbH offers innovative solutions for Science and Engineering. We partner with a number of worldwide well-known manufacturers of scientific & industrial equipment and focus on surface inspection and characterization.

Key products are optical and tactile 3D metrology tools, Nanoindenters, nanopositioning tools, film thickness measurement equipment and Scanning Probe Microscopes.

Our easy to use, high end tools are designed to make your life easier and guarantee a high sample throughput. They can be used in both, R&D and Quality control.

Benefit from our experience and our broad range of test and measurement capabilities.

More information can be found at www.schaefer-tec.com


 Press Releases

  • KLA Tencor nanoindenters offer a number of advantages not found in other systems. The indentation force is applied by means of a very linear electromagnetic transducer. This guarantees the highest precision of the data obtained. Therefore, the systems do not have to be recalibrated after each tip exchange, which means an enormous time saving and thus higher sample throughput.
    Various measuring heads with forces up to 10N allow the indentation of the hardest materials. A laser-induced heating of tip and sample allows indentation at temperatures up to 500oC without temperature gradients and therefore virtually drift-free.
    An Express test enables the measurement of 100 indents at 100 different positions within 100 seconds and thus delivers large amounts of data within a very short time for a statistical evaluation.
    Further interesting features are the AFM-like scanning of the sample by means of the indenter tip, as well as scratch tests and determination of the friction coefficient.

    Typical applications are:

    • Semiconductors, thin films, MEMS
    • Hard coatings, DLC coatings
    • Composite materials, polymers, fibers
    • Metals, ceramics
    • Biomaterials, biological tissue

  • ULVAC, a leading manufacturer of metrology- and deposition-tools, developed an innovative high-speed spectroscopic ellipsometer for many deposition applications, such as PVD, CVD, ALD and others.

    This novel spectroscopic ellipsometer can measure the thickness and optical constants of thin films at a dramatically fast speed. Its data acquisition time is as short as 10 ms. It does not require any active components for polarization-control, such as a rotating compensator or an electro-optical modulator.

    It creates great opportunities for new applications of the spectroscopic ellipsometry in which the compactness, simplicity, and rapid response are extremely important. The sensor head can easily be integrated into a deposition tool and successfully measure thin films in-situ and ex-situ.

    For other applications, e.g. semi-conductors and solar cells, there a portable, manual, and motorized instruments available for wafer sizes up to 300 mm.

  • Schaefer Technologie introduces the NenoVision-LiteScope which is an Add-On to existing Scanning Electron Microscopes.

    With the unique, true Correlative Probe and Electron Microscopy (CPEM) mode, the target layer within an IC can be analyzed with both SEM and Scanning Probe Microscopy in the same place, at the same time and in the same coordination system. The CPEM image contains the quantitative 3D surface topography information together with the typical SEM details.

    Integration of SPM/FIB/SEM techniques significantly simplifies the delayering process used for failure analysis, quality control, and R&D of integrated circuits.

    Schaefer Technologie expects your request of a free test measurement and confirmation that your SEM is compatible.

  • The MicroXAM-800 is an optical surface profiler from KLA-Tencor’s surface metrology product line. This non-contact, white light interferometry system differentiates itself with an innovative yet simple user interface. It features a powerful suite of functions to support the broadest range of applications.

    The MicroXAM-800 is a flexible platform for both acquiring and analyzing data. The system includes the hardware and software features necessary to meet stringent R&D and production environment requirements. Features include programmable stages, simple recipe set-up, scripting, and an expandable library of analysis tools. A variety of objectives, sample stages, and options are available to meet the needs of any application.

    The MicroXAM-800 supports applications in R&D and production, measuring texture, step height, and form. It is used in a variety of industries: LED, power devices, medical devices, MEMS, semiconductor, solar, and precision surfaces.

  • Schaefer Technologie will display in  booth no.613 a working Imina miBot™  set-up.

    miBot™ nanomanipulators are key components to perform various failure analysis methods. Our Nanoprobing Solution allows to characterize ICs such as NMOS and PMOS transistors of commercially available processors of 22 nm, 14 nm, and 10 nm technology nodes Their nanometer resolution over several centimeters range of displacement provides precise positioning and safe landing of probe needles on the analyzed devices. Moreover, the miBot™ rotation around the vertical axis allows the user to adjust the probe’s orientation in situ. Finally, the compactness of the miBot™ contributes in drastically reducing both the mechanical and thermal drifts compared to other marketed nanopositioning technologies.

    As the acceleration voltage of the SEM and the working distance must be reduced, the maneuverability of nanoprobers offering a risk-free positioning of delicate probes, the stability of the tips in contact with the sample and the ability to efficiently conduct and collect measure­ments are important factors to consider.


 Products

  • Imina miBot
    Micro-and Nano-Manipulation under Light- and Electron Microscopes...

  • miBot™ nanomanipulators are key components to perform various failure analysis methods. Our Nanoprobing Solution allows to characterize ICs such as NMOS and PMOS transistors of commercially available processors of 22 nm, 14 nm, and 10 nm technology nodes Their nanometer resolution over several centimeters range of displacement provides precise positioning and safe landing of probe needles on the analyzed devices. Moreover, the miBot™ rotation around the vertical axis allows the user to adjust the probe’s orientation in situ. Finally, the compactness of the miBot™ contributes in drastically reducing both the mechanical and thermal drifts compared to other marketed nanopositioning technologies.

    As the acceleration voltage of the SEM and the working distance must be reduced, the maneuverability of nanoprobers offering a risk-free positioning of delicate probes, the stability of the tips in contact with the sample and the ability to efficiently conduct and collect measure­ments are important factors to consider.


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