Entegris GmbH

Hugo- Junkers- Ring 5
Gebäude 107/ W
Dresden,  01109

  • Booth: A4421

Entegris, Inc. (NASDAQ: ENTG) is a leading global provider of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor and other high-technology industries.

• Filtration products that purify process gases, fluids, and the ambient fab environment

• Liquid systems and components that dispense, control, analyze or transport process fluids

• Gas delivery systems that safely store and deliver toxic gases

• Specialty chemistries for deposition and cleaning at advanced nodes

• Single-use assemblies for purity and reliability in storage, freezing, and shipment of bio-pharmaceutical products

• Specialty coatings that provide high-purity surfaces for wear-resistance, corrosion protection, and smoothness

• Premium graphite and silicon carbide for high-performance applications

• Shippers and trays for protecting and transporting disk drive components

• Wafer carriers and shippers that protect semiconductor wafers from contamination and breakage

Entegris is a leading global provider of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor industry.

 Press Releases

  • BILLERICA, Mass., June 25, 2018 – Entegris, Inc. (NASDAQ:ENTG), a leader in specialty chemicals and advanced materials solutions, announced today it has completed the acquisition of the SAES Pure Gas business from SAES Getters S.p.A. (“SAES Group”).

    Under the agreement, which was originally announced on June 6, 2018, Entegris has purchased the shares and assets which comprise the SAES Pure Gas business for approximately $355 million, subject to customary purchase price adjustments.

    “With this acquisition, we are even better positioned to meet the increasingly more stringent contamination control requirements within the semiconductor industry,” said Bertrand Loy, president and Chief Executive Officer of Entegris. “The combination of technology platforms and talent will help us create superior value for our customers and shareholders.”


    Entegris is a leader in specialty chemicals and advanced materials solutions for the microelectronics industry and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.  Additional information can be found at www.entegris.com/content/en/home/brands/saes-pure-gas.html.

  • BILLERICA, Mass., January 22, 2017 – Entegris, Inc. (NASDAQ: ENTG), a leader in specialty chemicals and advanced materials solutions for the microelectronics industry, announced today that it acquired Particle Sizing Systems, LLC., a company focused on particle sizing instrumentation for liquid applications in both semiconductor and life science industries. 

    This acquisition reflects Entegris’ value creation strategy by leveraging our global technology platform and customer relationships. The total purchase price of the acquisition was approximately $37 million in cash, subject to customary working capital adjustments. Entegris expects this transaction to be accretive to 2018 earnings.  Digital transformation continues to create a high demand for sophisticated cloud computing infrastructures that require the most advanced logic and memory chips available. However, advanced-node manufacturers already challenged by a continuously shrinking process window and high fab costs, struggle to maintain yield and eliminate losses associated with CMP performance.  

    In advanced-node CMP applications, scratch defects are often caused by the agglomeration of slurry abrasive particles, that have the potential to become a key factor in process yield performance. With the technology from PSS, Entegris is enabling customers with the ability to perform particle size analysis online and in real time, directly  in the fluid stream process.  Automating the monitoring process can lead to the application of more effective solutions, like proper filter selection and system maintenance. This ability to intervene with these solutions prevents costly yield excursions.

    “To stay competitive, our advanced-node customers need tools that allow them to shorten their process times while maintaining accuracy and consistency in order to meet the high quality standards of the manufactures they partner with," says Todd Edlund, Chief Operating Officer, Entegris. "PSS technology is unique in that it measures every particle in the slurry making it more accurate than commonly used methods that employ averaging techniques. As a result, this technology eliminates the need for manual sampling and intervention, which is less efficient and runs a higher risk of slurry excursions.” 

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