EtchDefender™ is a coating applied to quartzware that increases life up to 3x for quartz exposed to high temperature hydrochloric etch processes. The coating reduces: 1) replacement parts needed 2) maintenance man-hours to replace quartzware 3) production-hour loss due to maintenance and 4) yield-loss due to contamination introduced during maintenance cycles.
EtchDefender™ was originally developed to allow quartz thermocouple sheaths used for process control in epitaxial tools to last longer. It also has applications in other areas of the semiconductor industry where quartzware is attacked by HCl etch processes.
For a 1:30 video to learn more, visit: www.youtube.com/watch?time_continue=1&v=9mP-AcGlKGw.
For a more detailed 6:00 video, visit: www.youtube.com/watch?v=B9ziBjVmyMk.