Hugle Electronics, Inc.

4-5-7 Iidabashi
Hyuguru Building 2F
Chiyoda-ku,  Tokyo  102-0072

  • Booth: A4357

Container Cleaning Products

Front end products include semiautomatic and fully automatic cassette, SMIF, RSP, FOSB, FOUP Cleaner and

EUV pod cleaning systems and cleaning wafers for vacuum and e-chucks

Ionizer Systems, Pen type Ionizer

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