Bonner Strasse 498
Cologne,  D-50968

  • Booth: A4421

INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process control software that enhance productivity and quality in sophisticated industrial vacuum processes. These analysis, measurement and control products are essential for gas leak detection in air conditioning/ refrigeration, and automotive manufacturing. They are vital to equipment manufacturers and end-users in the complex fabrication of semiconductors and thin film coatings for optics, flat panel displays, solar cells and industrial vacuum coating applications. Other users of vacuum based processes include the life sciences, research, aerospace, packaging, heat treatment, laser cutting and many other industrial processes. We also leverage our expertise in vacuum technology to provide unique, toxic chemical analysis products for emergency response, security, and environmental monitoring. INFICON is headquartered in Switzerland and has world-class manufacturing facilities in Europe, the United States and China.


  • Dry Helium Leak Detector UL3000 Fab (PLUS)
    The INFICON helium leak detector UL3000 Fab (PLUS) is designed for the needs of leak testing in semiconductor applications. It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability....

  • Dry Helium Leak Detector UL3000 Fab (PLUS)

    The INFICON helium leak detector UL3000 Fab (PLUS) is designed for the needs of leak testing in semiconductor applications. 

    It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

    The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs. The HYDRO-S software in the UL3000 Fab PLUS eliminates the water vapour background and makes leak testing even faster. 

    The UL3000 Fab PLUS offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length.

    The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (PLUS) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

    A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (PLUS) even in tight spaces.

  • FabGuard® FDC
    Fabwide, Process Specific FabGuard FDC combines on-line Fault Detection and Classification (FDC) capabilities with powerful tools for fab engineers to readily analyze virtually any aspect of process and equipment behavior....

  • Redefining FDC - FabGuard Detection and Classification

    FabGuard FDC enables FDC engineering at all levels ranging from detailed hands-on chamber specific knowledge to fab-wide statistical process control.

    FabGuard is the only system that combines the sweeping functionality of fab-wide FDC systems together with tool specific data analysis capabilities for process engineering and equipment troubleshooting. Established fab Statistical Process Control (SPC) methods can be easily programmed into FabGuard with the added advantage of real-time tool interdiction. Wafer scrap is dramatically reduced when tool interdiction is applied as soon as a fault is detected. FabGuard reacts instantaneously to stop problem tools when an out of control condition is detected.

    FabGuard FDC Expert System Learns Your Process and Recognizes Problems

    SPC rules are frequently employed as a first line of defense to prevent product loss. FabGuard offers an additional level of protection - a trainable Expert System. Fab engineers can train FabGuard to recognize new problems as they appear and automatically detect them when they occur again. The problem solving know-how of fab engineers can be easily translated into FabGuard recipes that monitor any process step on any chamber on any tool. Running in parallel with SPC-based tool interdiction, FabGuard Expert System capability allows process and equipment engineers to train FabGuard to recognize problems that SPC methods may not detect. FabGuard Expert Systems allow engineering know-how to be programmed into FabGuard for an added level of wafer protection and fault identification.

    Fabwide Protection

    The FabGuard FDC system is deployable and sustainable at the factory level for real-time Statistical Process Control (SPC) on all wafer process equipment. A single user interface allows engineers to sort, display and analyze tool and process data with extreme flexibility and ease.

    • Fab engineers are provided with powerful tool-based data visualization and the ability to analyze all aspects of equipment and process behavior.
    • Process engineers can readily determine relationships between equipment state and wafer outcome.
    • Equipment engineers can quickly diagnose tool problems to reduce unscheduled downtime. Process chambers can be compared and matched.

    Tool, Sensor and Gauge Integration

    Collecting the right data at the right time is critical to detecting excursions and characterizing processes. Along with FDC analysis and excursion monitoring, FabGuard acts as an integration platform to allow engineers to collect data from a wide range of alternative data sources. The FabGuard architecture allows for easy integration of new sensors and gauges.

    • SECS
    • OPC
    • High-Speed Analog
    • INFICON Sensors (RGA, OES, RF/DC Arc Detection)
    • 3rd Party Sensors and Gauges

    Scaleability, Sustainability

    Data is archived and analysis results are stored in a relational database. FabGuard supports Microsoft®SQL, PostgreSQL or Oracle® databases. Hardware redundancy is eliminated through a tool-based system that is easily scalable from one tool to several hundred tools across an entire fab. FDC engineers can sort through and view all information through a single, easy-to-use, web-based interface. The consistent format throughout the fab improves the learning curve and facilitates the sharing of information among different process and equipment groups. Alarming, reporting and tool interdiction can be configured to the specific needs of user groups and equipment circumstances. INFICON has drawn upon its experience in leading fabs worldwide to create system templates that pay for themselves as quickly as they are deployed.

    The unique combination of real-time SPC and expert systems capabilities make FabGuard FDC the most powerful system available for detecting problems to prevent wafer loss and reduce unscheduled equipment downtime.

  • FabGuard® Advanced Process Control (APC)
    Timely information is essential for increasing fab productivity and remaining competitive in the market place. The pressure to enhance profitability makes it critical that a factory is productive and flexible, while increasing yield and throughput....

  • APC systems collect product measurements and recipe set points which are used to calculate new recipe set points that optimize wafer processing. The use of an APC System maximizes overall product yields and increases profit by making sure that each wafer performs as close to end of line metrics as possible.


    FabGuard APC increases yields, reduces costs and enhances manufacturing by providing optimal process set points to compensate for equipment and environmental variations.

    • Tailoring your yields: Whether customers demand faster computation speed, lower power consumption or other specific device requirements, FabGuard APC adjusts process recipes to drive product distributions toward the products consumers want and need. Better yields result in fewer wafer starts for the same number of die, resulting in higher capacity and lower wafer costs.
    • Get more from your tools: Extend the life of existing equipment by compensating for tool drift and performance inadequacies. FabGuard APC increases the capability of your tools and allows them to have wider processing ranges and eliminates the need for costly equipment dedication. Move to Closed Loop control and get control over your tools.
    • Drop the reworks: Reworking wafers is expensive and wastes valuable consumables and processing time. Use FabGuard APC to apply the best possible recipe settings the first time and reduce rework rates.

    Strategy and Flow

    FabGuard APC provides you with tools to create both custom logic and business rules. Tailor the process control logic to meet your local manufacturing needs. APC logic can be easily configured to handle special needs such as send-ahead lots, new product introduction, as well as parameter and data relaxation to deal with low running parts or special situations.


    Control strategies are designed to promote ease of use, utilizing a drag-and-drop ladder diagram interface. Components are dropped into the logic flow, connected to other blocks, and configured in place to allow for quick development and visualization of the logic flow.


    Developers can also extend the capability of the APC system by adding custom Java blocks to enable integration of third party data sources, custom mathematics, or specific and proprietary logic. These blocks are added to the existing system and extend capability without impacting core functionality.


    Integration Flexibility

    The FabGuard APC system provides upstream and downstream communication allowing messages to be set to and from the APC system. This allows the factory Automation system to send metrology data to the APC system, get results from the prediction calculations, and send used recipe parameters to the system.

    • Factory Automation: Using an XML protocol (E133.1 and legacy XML via HTTP) for control requests and data collection.
    • FabGuard FDC: Bi-directional communication with FabGuard Fault Detection and Classification Systems to merge FDC and control data for better understanding of processes and control moves.
  • FabGuard® eOCAP
    Integrated Out of Control Action Plans Increasing complexity of manufacturing and the need to correct issues in real time requires that everyone has access to expert knowledge that can be used to minimize downtime and correct issues....

  • Knowledge Management System

    FabGuard eOCAP helps organizations move beyond traditional knowledge repositories, interactively helping non-experts find and apply the right knowledge through relevant and properly sequenced multi-step processes. Additionally, FabGuard eOCAP can learn and constantly react to the changing relevance of different articles. The system helps factories to capture and automate the logical flow of protocols and troubleshooting procedures. It interacts with all levels of users to audit and validate outcomes and relevance. Because of these capabilities, FabGuard eOCAP makes the Knowledge Management System (KMS) more effective and eases the burden of manual maintenance so that deploying updated action plane and knowledge articles can result in a significant return on investment.

    Guided Troubleshooting

    Guided troubleshooting is an approach that directs a user to make the exact decisions that a domain expert would make based on years of experience. FabGuard eOCAP allows organizations to capture the sequence of questions that the domain experts ask when troubleshooting a complex issue and make that decision-making logic available to non-expert users. The result is that non-experts are able to perform like experts, ramping up much faster and acting decisively, with the same confidence as if an expert were at their side. Guided troubleshooting can be deterministic where the FabGuard eOCAP application directs the user through a specific series of steps.It can also perform in a predictive fashion, using heuristics and expert input to display a range of the most probable outcomes and optimal pathways to successful resolution.

    Predictive Diagnostics with Heuristic Learning

    Documentation is only a small piece of the entire knowledge management puzzle. For many knowledge bases, the sheer volume and constant changing of circumstances can make the upkeep of an accurate knowledge system virtually impossible. This is where machine learning becomes a necessity. Sometimes, in a diagnostic scenario, it is best to present engineers with a range of options and let them use their own judgment to navigate to the best solution. In these situations, FabGuard eOCAP is able to provide critical guidance by predicting the optimal pathways and most likely outcomes by using heuristic learning. Since FabGuard eOCAP records the exact pathway each user takes when running through diagnostic procedures, it is able to reference past history from previous runs and statistically predict which pathways and outcomes have the maximum potential for success. Users, and their natural usage, train the system over time. This ability to use heuristic learning to drive predictive behavior greatly reduces the cost and effort required to properly maintain a diagnostic or troubleshooting knowledge base.

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