ALK Bldg, 2 Partizansky Avenue
Minsk,  220033

  • Booth: A4265

Building Traditions Into the Future

KBTEM-OMO (Belarus) is:

  • Over 50 years in microelectronics engineering
  • High level vertical integration in design and manufacturing
  • Field proven tools for 1 µm, 0.6 µm, 0.35 µm, 0.13 µm and 90 nm technology node
  • Total solution provider for defect free mask manufacturing
  • Maskless lithography solution
  • Variety of wafer inspection systems
  • Unique solution for double-side lithography
  • Brand new tools only, no secondhand or refurbished tools

KBTEM-OMO performs scientific and technical development and production of special opto-mechanical process equipment as well as inspection and measurement equipment used in microelectronics products manufacture:

  • laser pattern generators for mask and wafer patterning;
  • wafer steppers;
  • large-field steppers;
  • mask aligners;
  • laser-based mask repair systems;
  • automatic mask inspection systems with high detection threshold,
  • wafer inspection tools for macro and micro defect inspection

KBTEM-OMO's unique in-house manufacturing facilities for precision mechanical and optical parts and components, linear step motor fabrication, certified quality and inspection lab provides for high vertical integration in engineering of opto-mechanical special systems and equipment.


  • Mask Manufacturing Systems
    Multibeam laser pattern generators; D2DB automatic mask inspection systems; Laser mask repair systems. All machines have the same coordinate system platform which allows to have ideal compatibility in the production line...

  • KBTEM-OMO offers the range of tools for Mask Manufacturing with unique ideal compatibility of all the systems in the production line, including:

    • compatibility of all tools coordinate systems;
    • stage travel control algorithms being the same for all the tools;
    • unified approach to coordinate systems’ compensation;
    • unified system of design data conversion for pattern generation and mask inspection;
    • unified data format may be created by forming the database based on pattern defects and defects’ classification;
    • unification of control systems, user-friendly interface;
    • small space and low cost of ownership.


    • 130, 90 nm UV, DUV laser tools
    • Multi-beam raster-scan technology
    • Phase shift mask production
    • Direct substrate patterning option
    • 16/32-beam optical architecture


    • 130nm, 90 nm technology node
    • 0.25, 0.15 µm pixel size
    • Die-to-Database inspection to SEMI standards
    • High throughput

    LASER MASK REPAIR: EM-5131, EM-5141

    •  0.2, 0.15 µm min feature size
    •  Process switch to opaque/transparent defects repair
    •  Pattern copy repair
    •  Through pellicle repair
  • Wafer Patterning and Inspection Systems
    Product range: Direct writing pattern generator; Mask Aligner Wafer Stepper; Automatic wafer defect inspection Wafer inspection...


    •1.0, 0.6, 0.35 µm single- and multi-beam laser pattern generators

    • Process switch to substrate/mask writing modes

    • Wafer Ø: 300, 200, 150, 100 mm


    • Contact / proximity printing

    • Automated / manual wafer loading

    • Double-side lithography

    • High alignment accuracy 0.4 ~0.7 um resolution

    - wedge compensation and wafer thickness compensation with no contact to mask;
    - 3D (X, Y, Q) high precision wafer manipulator with coarse and fine alignment modes;
    - irregular substrates type and size ( wafer thickness 0.2~0.8 mm, fragile wafer types (GaAs, LiNbO3, etc.) , rectangular;
    - built-in vibration protection unit;
    - energy saving mode.


    • Lamp / solid state laser light source

    • 0.8, 0.35 µm technology node

    • Automatic scaling

    • Double-side alignment

    •Wafer Ø: 200, 150, 100 mm


    • Micro / macro defects inspection

    • Imposed defects inspection

    • High resolution

    • Low cost of ownership (COO)


    • CD inspection

    • Wafer flatness inspection

    • Coordinates and overlay inspection

    • Visual inspection

  • Optics Parts
    In-house optical factory allows to manufare variour optical parts and components, as well as optical coatings...

  • The following optical components and optical coatings can be custom ordered made in low/small volume quanitites

        - Opto-mechanical components
        - Deflectors
        - Aspherical parts
        - Prisms
        - Interference beam splitters
        - Raster parts
        - Lens
        - Plane-parallel components
        - Wedges
        - Basic and working test glass
        - Mirrors
        - Antireflection coatings
        - Products made by photolithography, including vacuum stages

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".