For application of wafers from 3" up to 300mm of diameter. Systems transfer from plastic carrier to any kind of process carrier, including quartz or SiC carrier. Automatic handling process like simple wafer transfer, back to back transfer or merge and split batches are available.
It´s easy to integrate COMET batch transfer in your process line. All models are fast, clean, reliable and accurate. The transfer system is customizable for your different boats and carriers and compatible with your communication requirements. Operating - with one button system - is simple as well as the maintenance.
GEMINI- one of the world smallest batch transfer system can be use anywhere in the Fab, replacing conventional horizontal pushers for a safe transfer.