Oxford Instruments

North End Road, Yatton
Bristol,  North Somerset  BS49 4AP

United Kingdom
https://plasma.oxinst.com
  • Booth: A4121

Oxford Instruments, World Leader in Plasma Process Solutions

Oxford Instruments Plasma Technology is a leading provider of etch and deposition process solutions for nanometre-sized features, nanolayers, and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma, ion beam and atomic layer deposition and etch. Products range from clustered cassette-to-cassette platforms for high-throughput production processing to compact stand-alone systems for R&D.

We provide a range of technologies:

  • Atomic Layer Deposition
  • Atomic Layer Etching
  • CVD
  • Deep Silicon Etching
  • ICP Etching
  • ICPCVD
  • Ion Beam Etching
  • Ion Beam Deposition
  • PECVD
  • Reactive Ion Etching
  • RIE-PE


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