Specifically Built for Large Sample Wafer Inspection
The entire 300 mm wafer area can be analyzed for low-noise AFM measurements. This opens up a whole new scope of measurement automation, allowing engineers to work faster, more simply, and with greater precision.
Proven NX20 Performance with a 300 mm sample stage
With its enlarged platform that supports a 300mm motorized XY stage, the NX20 300 mm takes this a step further, allowing users to inspect larger samples easily and with extremely high accuracy.
Park SmartScan™ makes getting accurate measurements simple
The Park NX20 is equipped with our SmartScan OS, making it one of the easiest to use AFMs on the market. With an intuitive but extremely powerful interface, even untrained users can quickly scan a large sample without supervision.
Optimized for a Wide Range of Applications
With the ability to measure roughness, height and depth, perform defect reviews, electrical and magnetic failure analyses, thermal property characterization, and nanomechanical property imaging, the AFM is ideally suited to a wide range of tasks performed by FA, QA, and QC engineers that work with large samples.