Pfeiffer Vacuum GmbH

Berliner Strasse 43
Asslar,  35614

  • Booth: A4421

Visit us at booth B1221 for complete vacuum solutions!

Pfeiffer Vacuum provides advanced vacuum technology, high quality and comprehensive vacuum solutions, as well as first-class service.

As the inventor of the turbopump, we pioneered innovation and progress in the vacuum industry. Thanks to close collaboration with our customers and our continued focus on their needs, we constantly optimize and expand our product line.  

Our product line includes turbopumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we offer low vibration vacuum solutions. Additionally, Pfeiffer Vacuum offers leak detectors and solutions for Airborne Contamination Management (AMC).

In 2017, the Group significantly expanded its product portfolio by acquiring Nor-Cal Products. The product range includes flanges, valves, fittings and chambers as well as custom components.

Pfeiffer Vacuum has approx. 3,200 employees worldwide and more than 20 subsidiaries. The corporation is listed on the German TecDAX stock index.

 Press Releases

  • The ASM 390 and ASM 392 are leak detection solutions adapted to the semiconductor and display industries as well as to other demanding applications where rapid pump down and high sensitivity is key. Both models are Semi S2 compliant. The leak detectors are fitted with a dry frictionless backing pump  and a powerful high vacuum pump, making them the ideal tools for leak testing of various components in clean environments. Equipped with an additional turbopump, the ASM 392 will speed up the leak

    detection process to reduce the downtime of the production equipment. The ASM 390 and ASM 392 have been developed to provide full confidence in leak testing regardless of operator knowledge. They deliver accurate results in minimal time, making them highly efficient in the field. ASM 390 and ASM 392 are uniquely ergonomic with a convenient size and height, a secondary handle in the front, a fully rotatable, removable display, an inlet in the front for easy connection to test ports and maneuverability for access to all testing areas, even in tight spaces. Thanks to a wide, clear color touch panel display, an integrated toolbox with modular compartments and storage space for vacuum bellows, leak detection can be very easy.

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