LEVITRONIX – Better Pumps for Better Yield!
Levitronix develops, markets, and sells pumps, mixers, flowmeters and flow control systems to the Semiconductor Industry. Levitronix products use a revolutionary magnetic levitation technology, which allows for contact-free, and thus, particle-free operation. With no mechanical wear, Levitronix pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix pumps deliver continuous flow allowing for precise electronic control of flow and pressure. The Levitronix pumping systems are designed for high-purity fluid applications where extremely low particle shedding and metal contamination are required. Tests conducted by an independent laboratory prove that particle generation from a Levitronix pump is significantly less than that from diaphragm pumps. Comparative tests among Levitronix, bellows and diaphragm pumps, conducted with CMP slurries, showed the Levitronix pumps producing 200-1,000 times fewer large particles which can scratch and damage wafers. Highest market share of liquid pumps in: • CMP slurry delivery • Single wafer cleaning • Electrochemical deposition
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