Paul-Meisinger-Str. 18
Deuerling,  D-93180

  • Booth: A411

Ozone Equipment, Precursor and Dopant Delivery Solutions

POSAS GmbH can offer all kind of Ozone Equipment like generators, analysers, calibrators, destruct units or complete Delivery Systems as well as sensor products to Enhance the Overall Equipment Efficiency (OEE) via Advanced Process Control (APC) like the Piezocon concentration sensor for precise precursor delivery, NDIR end-point-detectors for NF3, CO2... cleans, In-Situ Wafer Temperature Measurement. POSAS is also a specialist for In-Line monitoring systems of chemical composition and physical properties of wet processes based on IR or UV Technology. We represent: Applied Precision, AEROQUAL (gas detection), CI-SEMI (Chemical Monitoring, Pyrometer), Teledyne, INUSA (Ozone), LOREX (gas analyser), and we are the VEECO Channel Partner for all Veeco Flow Technologies Products in Europe

NEW: we can offer Teledyne Instruments, Precursor Delivery Systems and Gas Mixing Systems



Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".