Considerable costs can be saved with our new Slurry Recycling Systems. Up until now, the abraded polishing slurry has to be disposed of and replaced during the polishing or planarizing process. With the compact Slurry Recycling System, which can be easily integrated into the polishing process, the used polishing slurry from the polishing tool can be collected and filtered. The PH- control determines whether the recycled slurry can be reused for a given time. Otherwise, the slurry is recycled by chemical "Spiking", mixed with fresh slurry and honed for a new polishing process. The dosage occurs automatically. Thanks to efficient slurry reclamation with low energy consumption, the valuable recycled substance can be economically reused. This not only reduces production costs, but also contributes significantly to reducing the impact on environmental pollution.