Purification Equipment Research Institute of China Shipbuilding Industry Corpora
PERIC:shortspecial gases production main products :NF3&WF6
Purification Equipment Research Institute of CISC is located in Handan, Hebei Province. It is the best and the largest special gas manufacturer in China. It products NF3，WF6，HCl，C4F6，C4F8，C2F6，SiF4, C3F8, HF, CO2, SiH4, N2O, NH3, 1.2%He/N2, 15% Xe/N2, 1.25%Kr/Ne, 3.5%Ar/10ppmXe/Ne, (1%-20%)PH3/H2, 30%O2/He, 10%CH4/Ar, 1%PH3/N2, 1%O2/Ar, 2.7%C2H4/He, 4%H2/N2, 5%NF3/N2, 4%H2/Ne, 4.5%HCl/0.9%H2/Ne, He, Ne, Xe, Kr, Ne, N2, He, O2, Ar. It has own intellectual property.