Puerstinger High Purity Systems GmbH

Gewerbepark Lindach B3-B4
Burghausen,  D-84489

Germany
http://www.puerstinger.com
  • Booth: A4444


Puerstinger High Purity Systems GmbH Solutions in Quality

The Puerstinger group company combines years of experience and competence in the areas of pipelines, distribution and waste technology, distribution systems, as well as processing facilities associated with chemistry. Through the synergy of this range of services, we are capable of offering an unique, complete service to our customers from a single source.

We advise you from the beginning of the project planning phase and guide you through engineering to the planning production until the completion of the project.

With our four locations in Europe and Asia, we are one of the leading companies in the sector of high purity applications.


 Products

  • Manual Wetbench
    Manual Wetbench made out of stainless steel, for development of new processes and lab applications...

  • suitable flat wall integration into cleanroom wall

    • tool housing built according to ATEX design rules
    • benchtop made out of stainless stell
    • integrated leakproof collection pan with leak sensor
    • 40khz ultrasonic bath
    • time preselction for ultrasonic function
    • temperature setpoint and control
    • integrated overtemp control in ultrasonic bath
    • integrated waste drum, accessible /changeable from rear side (greyroom)
    • pneumatic drainvalve for bath drain into waste drum
    • ATEX certified waste drum present sensor
    • ATEX certified  waste drum level senor
    • N2 gun
    • DI water gun with integrated recirculation
    • integrated bath rim exhaust
    • integrated tool exhaust for work and chem area individually adjustable with manual adjusting slides

    Basicaly many version of manual wetbenches are possible. Configurations are based on customer request and demand.

  • Manual Wetbench made out of plastic
    Manual Wetbench made out of plastic, for development of new processes and lab applications...

  • suitable flat wall integration into cleanroom wall

    • tool housing made out of poly propylen nature
    • perforated  benchtop in PP nature
    • integrated leakproof collection pan with leak sensor
    • 2 deepdrawn process bath with manaul lid
    • integrated waste drum, accessible /changeable from rear side (greyroom)
    • pneumatic drainvalve for bath drain into waste drum
    • present sensor for waste drum detection
    • level sensor for waste drum
    • N2 gun
    • DI water gun with integrated recirculation
    • water tap for  DI Water
    • 2 vacuum tweezers
    • Quick Dump Rinse overflow bath with low flow, high flow und spray funktion
    • integrated spin coater with controller for free programable process recipes
    • 2 PFA coated Hot Plates with temperature setpoint and overtempcontrol
    • integrated tool exhaust for work and chem area individually adjustable with manual adjusting slides

    Basicaly many version of manual wetbenches are possible. Configurations are based on customer request and demand.

  • TMAH Onside Dilution System
    Since 2006, PUE ODS (onside dilution system) systems for TMAH are successfully implemented on the market. Our ODS was designed to dilute concentrated TMAH precisely to the requested dilution....

  • Highest accuracy and reproducibility of the dilution is achieved by multiple step dosing and measurement. The target value is verified by an independent metrology module.
    In addition, surfactant dosing is available. After volumetric dosing and mixing, the target value is verified by an additional independent metrology module.

    • Fast ROI (Return of Invest)
    • 70% cost reduction
    • Dilution TMAH 25% down to 2.38%, 2,48% or customers request
    • Surfactant dosing as option
    • Accuracy: +/-0.002% wt.
    • Available capacities: 75 – 1000 Liter / hour
    • Easy implementation in existing TMAH distribution
    • Redundant design
    • High precision metrology: Metrohm®, SITA® and Mettler Toledo®
  • Slurry Recycling Station
    PUE install complete solutions and customized special solutions for the entire production process from seed crystal through to the finished wafer. For the semiconductor industry, we offer various Slurry Mix Systems and supply....

  • Considerable costs can be saved with our new Slurry Recycling Systems. Up until now, the abraded polishing slurry has to be disposed of and replaced during the polishing or planarizing process. With the compact Slurry Recycling System, which can be easily integrated into the polishing process, the used polishing slurry from the polishing tool can be collected and filtered. The PH- control determines whether the recycled slurry can be reused for a given time. Otherwise, the slurry is recycled by chemical "Spiking", mixed with fresh slurry and honed for a new polishing process. The dosage occurs automatically. Thanks to efficient slurry reclamation with low energy consumption, the valuable recycled substance can be economically reused. This not only reduces production costs, but also contributes significantly to reducing the impact on environmental pollution.


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