Purification Equipment Research Institute of China Shipbuilding Industry Corpora

No. 17, Zhan Lan Road
Han Dan City,  Hebei  056002

  • Booth: A4266

PERIC:shortspecial gases production main products :NF3&WF6

Purification Equipment Research Institute of CISC is located in Handan, Hebei Province. It is the best and the largest special gas manufacturer in China. It products NF3,WF6,HCl,C4F6,C4F8,C2F6,SiF4, C3F8, HF, CO2, SiH4, N2O, NH3, 1.2%He/N2, 15% Xe/N2, 1.25%Kr/Ne, 3.5%Ar/10ppmXe/Ne, (1%-20%)PH3/H2, 30%O2/He, 10%CH4/Ar, 1%PH3/N2, 1%O2/Ar, 2.7%C2H4/He, 4%H2/N2, 5%NF3/N2, 4%H2/Ne, 4.5%HCl/0.9%H2/Ne, He, Ne, Xe, Kr, Ne, N2, He, O2, Ar. It has own intellectual property. 

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