Superior Automation, Inc.

47770 Westinghouse Drive
Fremont,  CA  94539

United States
http://www.superiorautomation.com
  • Booth: A4652

Superior Automation is an industry leading provider of Wet Process Equipment and Chemical Delivery Systems for the semiconductor, compound semiconductor, and related industries. Our company offers advanced solutions for the processing of IC devices, PV, medical devices, LED’s, and MEMS.

With installations throughout the United States, China, South East Asia, and Europe, backed by world class service and support, Superior Automation has established a record of providing a complete line of Wet Process and Chemical Delivery Systems with field proven reliability, flexibility, safety, and low cost of ownership.

Focused on working closely with our customers to assure complete satisfaction, Superior Automation’s commitment is to provide the highest value and quality in our products and services through continuous development and improvement.


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