Tomoe Engineering Co.,Ltd

5-15 Kitashinagawa 5-Chome Shinagawa-ku
Tokyo,  141-0001

  • Booth: A4703

CVD-Bulk SiC Machined Parts

  Edge Ring

  Shower Plate (Upper Electrode)

  Vaccum Chuck (for Litho)

Electrostatic Chuck

   Brand-new (AlN Al2O3)

   Refurbish (Re-coating, Surface Re-pattering)  mmmmm


We are dealing with various ceramic and graphite products for semiconductor market.

Especially the materials made by CVD (Chemical Vapor Depostion) have very unique properties in theraml and mechanial.

If you have any questions, please feel free to contact us. 

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