TSI

Neukoellner Strasse 4
Aachen,  D-52068

Germany
http://www.tsi.com
  • Booth: A41005

As an international leader in measurement technology for over 50 years, TSI Incorporated provides various solutions for semiconductor applications used in national and standards laboratories worldwide. TSI is a recognized leader in high-sensitivity particle counting and offers a range of instruments to improve the fabrication process by monitoring sub-micrometer and nanoparticles.
Semiconductor node scales continue to decrease to single-digit nanometer dimensions. Monitoring sub-micrometer airborne particle contamination is vital to ensure high product yield and reduce waste by eliminating sources of contamination. TSI instruments provide the best measurement and data to help keep the processes in control. This can be done using real-time airborne particle counters to detect particulates that are sources of cleanroom contamination. Immediate corrective action is critical to increasing product yield and reducing cleanroom operational costs.


 Products

  • Condensation Particle Counter
    The TSI AeroTrak® Cleanroom Condensation Particle Counter (CPC) is the only water-based, laminar flow, high flow rate instrument on the market—providing the confidence needed for monitoring critical environments...

  • Using patented technology, the instrument provides 10 nm sensitivity at a 0.1 CFM (2.83 L/min) flow rate. With an ultra-low false count rate, the AeroTrak® Cleanroom CPC is ideally suited for the low particle concentrations found in ISO Class 1 and Class 2 environments keeping manufactured products safe from nanoparticle contamination.
    Unlike other high flow rate water-based CPCs, the TSI AeroTrak® Cleanroom CPC does not use turbulent mixing, minimizing particle losses and increasing count accuracy. Unlike alcohol or other non-water based CPCs, the TSI AeroTrak® Cleanroom CPC does not introduce chemicals into clean environments. The TSI AeroTrak® Cleanroom CPC has the same easy-to-use graphics interface as other TSI AeroTrak® Particle Counters. Multiple particle counting configurations can be conveniently stored and uploaded as needed. The TSI AeroTrak® Cleanroom CPC can be used as a standalone particle counter or run continuously, integrated into a facility monitoring system like the TSI FMS Software. Optionally, the instrument can be interfaced to other systems using the Ethernet interface and Modbus communications.

  • Remote Particle Counters
    TSI Aerotrak® Remote Particle Counters are designed for use with FMS Software in cleanroom monitoring systems or facility monitoring systems. Their small size and flexible power options allow installation where space is limited....

  • TSI Aerotrak® Remote Particle Counters are designed for use with FMS Software in cleanroom monitoring systems or facility monitoring systems. Their small size and flexible power options allow installation where space is limited. Best in class data buffering reduces risk of data loss during network outages.

    In particular, the 1 CFM AeroTrak® 7110 Remote Particle Counter is designed to meet the rigid requirements for semiconductor cleanroom applications and is covered by a 4 year laser warranty.

    TSI AeroTrak® Remote Particle Counters are available in a variety of:

    • Flow rates
    • Particle sizes
    • Analog output options
    • Local alarms
    • VHP-resistant models

    All TSI AeroTrak® Remote Particle Counters:

    • Comply with ISO 21501-4
    • Operate in conjunction with a facility monitoring system, including TSI FMS Software
  • Portable Particle Counters
    TSI Aerotrak® Portable Particle Counters save time and money. The built-in global regulatory guidance and international standards allow for easy compliance to ISO-14644-1, EU GMP Annex 1, and FS209E....

  • TSI Aerotrak® Portable Particle Counters save time and money. The built-in global regulatory guidance and international standards allow for easy compliance to ISO-14644-1, EU GMP Annex 1, and FS209E. This makes certifying or spot-checking cleanroom environments simple.

    The 1 CFM AeroTrak 9110 Portable Particle Counter is especially designed to meet the rigid requirements for semiconductor cleanroom applications and is covered by a 4 year laser warranty.

    TSI AeroTrak® Portable Particle Counters include:

    • Easy-to-use interface which guides users through the classification process
    • High flow rate options for sampling of a large volume of air for analysis
    • Multiple data viewing/reporting options:
      - On-screen
      - Download, using TSI TrakPro™ Lite Secure Software (21CFR Part 11 compliant)
      - Print, from built-in printer

    All TSI Portable Particle Counters are:

    • ISO 21501-4 compliant
    • Capable of operating as standalone instruments
    • Capable of operating in conjunction with a facility monitoring system, including TSI FMS Software
  • Facility Monitoring System
    TSI FMS is an advanced, reliable, and user-friendly monitoring software suite that features a truly distributed architecture....

  • TSI FMS is an advanced, reliable, and user-friendly monitoring software suite that features a truly distributed architecture. With best in class features, such as OPC UA Client/Server, distributed databases, and hot standby, TSI FMS Software offers the unparalleled flexibility and reliability for different IT systems and software applications to communicate and exchange data. This data can then be used to continuously monitor a critical manufacturing space.

    The OPC UA Client/Server functionality decreases installation costs by simplifying facility monitoring system design, offering easy and immediate access to real-time and historic data from all sensors connected to FMS. OPC UA Client/Server securely exchanges data between industrial platforms with ease and reliability, enabling transfer of critical facility monitoring system data to centralized enterprise reporting systems such as LIMS and ERP.


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