Vacuum Engineering & Materials

390 Reed Ave.
Santa Clara,  CA  95050

United States
  • Booth: A4334

Vacuum Engineering and Materials (VEM) is a leading full-service provider of high-quality PVD materials, shield cleaning and reclamation services used in the semiconductor, wireless, photonics, LED, data storage, aerospace & defense and life sciences markets.  Headquartered in Silicon Valley with 30+ years of experience, VEM serves over 350 customers globally and has a track record for providing outstanding service and support.

From cutting edge R&D needs to large production requirements, VEM offers a full range of product and service solutions.  Our product portfolio, ranging from high-purity PVD sputtering targets to evaporation materials, spans the periodic table and we have an experienced technical team developing innovative new materials.  VEM's state-of-the-art shield cleaning and reclamation services provide our customers with one-stop solutions enabling them to focus on their core businesses.  VEM is ISO 9001:2015 certified.  More information can be found at  


  • Ultra-Pure Au Evaporation Materials (UP Au)
    VEM Ultra-Pure Au evaporation materials enable PVD users to; minimize spitting by reducing carbon and other contaminants, improve yield and increase production uptime....

  • Our proprietary process extracts more contaminants that cause spitting from the gold material. Often the contaminant is observed as a carbonaceous film that leads to spitting and particle generation. Using several unique post fabrication processes enables VEM to offer exceptionally pure sources that have minimal residue and surface contamination. Ease of use, minimal conditioning and the consistently stable evaporation process are the hallmark of VEM's UP Au evaporation materials.
  • PVD Material Development Services
    VEM continues to innovate by having one of the largest, cutting-edge Vacuum Hot Presses in the industry, allowing customers to develop some of the most advanced powder metallurgy targets available in the market....

    • 250 ton, 2000°C Vacuum Hot Press for targets ranging from 50mm - 450mm.

    • Powder Lab with multiple blending tools including an Eirich Blender for quick homogenous material blends.

    • Induction Melting Equipment, Process Logic Controlled, to ensure repeatable process.

    • Casting, Forging and Rolling capability.

    • High-purity Indium Bonding, Ultrasonic Testing, ICP Analysis and Laser Inscribing.

    Some of the target materials available for hot press are Al2O3, AZO, BST, CrB2+SiC+other materials, CrSi-SiC, ITO, LiCo2O3, MoSi, NbTa, NiCrSi, NiFe + other materials, Ru, SiAl, SiCr, Ta, TaSi, TiAl, WTi, and WSi.

  • Shield Cleaning and Reclamation Services
    VEM provides precision parts cleaning and surface treatment of PVD shield kits, as well as other process kit types, for manufacturers in the semiconductor, photonics, LED, data storage, aerospace & defense and life sciences industries...

  • In addition to automated robotic controlled Twin Wire Arc Spray (TWAS) and Plasma Spray capability, our facility includes equipment for ultrasonic cleaning, cleanroom drying, bake out, new cleaning processes, and a cleanroom certified to Class 100.

    The Twin Wire Arc Spray is a leading-edge technology that increases mean wafer between clean (MWBC) by applying an enhanced, textured coating on critical chamber components. The textured coating provides increased surface area of the parts and allows more material to be deposited as well as better deposition adhesion for better particle control. The Plasma Spray system allows for the ability to coat chamber components with high purity ceramic films, such as Al2O3 and Y2O3 to extend part life and improve surface cleanliness of parts.

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