Fabmatics GmbH

Zur Steinhöhe 1
Dresden,  01109

Germany
http://www.fabmatics.com
  • Booth: A4421


Material Handling Automation for Semiconductor Factories

Fabmatics is an experienced specialist for the automation of material flows and handling processes in semiconductor manufacturing plants, semiconductor process equipments and other high-tech production environments. The company has been implementing automation projects with great success for more than 25 years.

Fabmatics is in a unique position to offer its customers comprehensive solutions in the field of material flow automation from a single source. The service portfolio includes a modular product range of hardware and software for the automation of handling, transport and storage processes as well as solutions for product identification and localization. The offer is supplemented by consulting and development services from the company’s own R & D department in order to provide customized solutions with the highest degree of individualization depth and functional reliability.

Fabmatics does business around the world and currently has some 190 employees at its headquarters in Dresden, Germany and its US subsidiary in Sandy, Utah.


 Products

  • Autonomous Navigating Mobile Robots
    The HERO FAB combines an established, clean and safe Robot system, with an innovative vehicle (AGV). SCOUT is an autonomously navigating mobile robot for the flexible transportation of materials and handling tasks in semiconductor fabs....

  • Mobile Robot HERO FAB:

    • Omni-directional drive unit no need for turning of vehicle
    • High payload of vehicle of 100 kg – 150 kg
    • Fast fine alignment (~1s) and accurate carrier positioning (<1mm)
    • Loading reach of up to 200 mm – 1500 mm height (corresponds to 4 shelf levels), for Reticle Loading (RSPs) up to >1600 mm
    • Advanced safety systems to guarantee human, object and environmental safety
    • Suitable for up to ISO 3/2 environments (open cassettes)
    • Versions for SMIF pods, RSPs, FOUPs, transport boxes and open cassettes
    • 24/7 working szenarios possible for most applications (no extra charging time, on-the-fly-charging)

    HERO FAB 300 Data Sheet

    HERO FAB Website

    HERO FAB Video

    Mobile Robot SCOUT:

    • navigates autonomously
    • does not require any kind of guidance system neither on the floor nor on the ceiling
    • can even be used safely in areas where people and machines work closely together
    • is cleanroom suitable up to ISO class 3 / US FED class1
    • operates up to 18 hours per day and will recharge within 5 hours
    • SCOUT is capable of transporting various materials and products between any point in the fab,
    • taking measurements, providing tools and auxiliaries. Various attachments like mechanical manipulators and transportation trays enable the SCOUT to be adjusted to different conditions according to the desired use.
       

    SCOUT Video

    SCOUT Brochure

    SCOUT Website

  • FlatStocker for Zero Footprint Storage
    FlatStocker by Fabmatics is an innovative system to store Wafer cassettes, boxes and other material carriers underneath the cleanroom ceiling....

  • Without using costly clean room floor space, this innovative stocker system hangs from the ceiling and can be designed to handle variety of cassette types (HA200-boxes, open cassettes, SMIF Pods, FOUPs). The FlatStocker provides carrier ID information, in real time, to the customer’s MCS (Material Control System) using RFID or barcode technology. Connection to a transportation system combined with vertical lifts, enables the system to quickly store or retrieve lots. The simple design is based on proven industrial components. This enables great flexibility in laying out the most effective configurations to meet the customer’s storage requirements and available space.

    FlatStocker Product Brochure

    FlatStocker Website

  • FOUP Purge System
    The retrofittable system avoids oxidation and other chemical reactions on the wafer surface by purging the FOUP with an inert gas (e.g. N2) during interim storage. It can be easily retrofitted to existing storage modules (e.g. Zero Footprint Storage)....

  • The retrofittable FOUP Purge System by Fabmatics purges FOUPs with an inert gas during interim storage. Thus, it reliably protects wafers between process steps from undesired chemical reactions due to humidity and evaporation.

    Features:

    • May be easily retrofitted with existing systems for FOUP storage (e.g. Zero Footprint Storage, Stocker) without having to change the fab structure during regular fab operations
    • Independent purge functionality for each nest, no gas spill / waste
    • Constant gas flow during the entire storage period
    • Every purge nest is individually monitored and controlled

    Benefits:

    • Avoids AMC (Airborne Molecular Contamination) and other chemical reactions
    • Allows extended queue time between process steps
    • Improves overall process yield

    Brochure FOUP Purge System

    Website FOUP Purge System


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