CS CLEAN SOLUTIONS AG

Fraunhoferstrasse 4
Ismaning,  85737

Germany
http://www.csclean.com
  • Booth: A4421


Your reliable, worldwide partner for exhaust gas abatement.

CS CLEAN SOLUTIONS uses advanced chemisorber technology to design waste gas abatement systems which are unmatched in their scrubbing efficiency, yet absolutely simple to operate.

CLEANSORB dry absorber systems consume neither electricity, water, nor fuel. Moreover, there is no contamination of precious water resources due to discharge of contaminated waste water – a major benefit in terms of eco balance.

One column of CLEANSORB granulate typically binds several thousand liters of hazardous gas into safe, solid by-products. Used CLEANSORB columns are not discarded, but refilled with fresh absorbent with minimal generation of waste material.

CLEANSORB granulate converts hazardous gases into stable inorganic salts at ambient temperature. It is the most elegant and environmentally friendly purification technology of exhaust gas abatement. A wide range of CLEANSORB model sizes are available to meet the needs of all our customers, from small-scale university researchers to round-the-clock wafer fabrication.

CS CLEAN SOLUTIONS has over 30 years of experience in dry bed chemisorption technology and offers optimised solutions for all process applications.


 Products

  • CLEANSORB® PRIMELINE PS AND PD (24/7)
    The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. These are especially engineered to handle the gas flows and related operating conditions of safety-critical process applications....

  • CLEANSORB® PRIMELINE PS AND PD

    The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. The system is especially engineered to handle the gas flows and related operating conditions of safety-critical process applications – notably those of Metal Organic Chemical Vapor Deposition (MOCVD).

    The smaller-footprint CLEANSORB PS models feature a back-up column, allowing production to be run to completion even after the capacity of the main absorber column has become depleted. The larger CLEANSORB PD model incorporates two full-size absorber columns plus a back-up column; one main column can remain active absorbing exhaust gas with full SEMI-S2-compliant safety protection, while the second column is independently purged before removal from the cabinet for refilling.

    Your advantages:

    • Dedicated CLEANSORB® chemisorber media for critical MOCVD gases such as AsH3, PH3 or GeH4
    • Optimized for safe thermal management of high flow silicon and III-V epitaxial processes
    • Unique safety functions such as infra-red temperature monitoring and inert gas cooling
    • Touch-screen control (PD model) with automated operating routines
    • Available as SEMI-S2 compliant version with redundant safety features
  • CLEANSORB® LABLINE
    The ability to passively chemisorb hazardous gases at ambient temperature is a particular advantage for sporadic laboratory work since the LABLINE is not started up each time a new experiment is to be run....

  • The CLEANSORB LABLINE features a small absorber column housed in a compact, air-extracted cabinet. The ability to passively chemisorb hazardous gases at ambient temperature is a particular advantage for sporadic laboratory work since the LABLINE is not started up each time a new experiment is to be run.

    The wide selectivity of CLEANSORB® chemisorber media to a diverse list of gases and liquid precursors, ranging from corrosive or toxic species to latest-generation metalorganic complexes, offers ideal flexibility for R&D requirements.

    Your advantages:

    • Negligible installation costs for laboratory environment, simple to operate
    • Long column lifetime on R&D applications – low running costs
    • Can be used to abate combined vent purge gases from several gas cabinets
    • Front panel control and parameter display, volt-free contacts and a digital signal interface
  • CLEANSORB® FABLINE
    FABLINE is the model of choice for a wide range of process applications including: Plasma Etching, CVD, ALD, Ion Implantation and CIGS Photovoltaics....

  • FABLINE is the standard CLEANSORB model for waste gas removal on factory-scale applications. Available in three column sizes, the system is readily adaptable to the requirements of both pilot line and full-scale manufacturing. Enabled by the built-in safety and efficiency of CS CLEAN SOLUTIONS proprietary CLEANSORB® media, and with several thousand installations worldwide, FABLINE is the model of choice for a wide range of process applications including: Plasma Etching, CVD, ALD, Ion Implantation and CIGS Photovoltaics.

    Your advantages:

    • Passive operating principle, does not require electricity, heating, fuel or water
    • Built from corrosion-resistant 316L stainless steel and high quality, trustworthy components
    • Automated routines for pressure-hold testing and inert gas purging simplify column-change
    • Wide range of configurations and options, including integrated blower
    • Available as SEMI-S2 compliant version with redundant safety features
  • CLEANSORB® Stand-Alone
    For small-scale research work, stand-alone absorber columns can be used to remove remaining gas concentrations downstream downstream of experimental apparatus....

  • For small-scale research work, stand-alone absorber columns can be used to remove remaining gas concentrations downstream downstream of experimental apparatus. Several safety components are available as accessories, including an air-extractable housing cabinet as well as options for pressure monitoring and downstream gas detection.

    The ability to passively chemisorb hazardous gases at ambient temperature is a particular advantage for sporadic laboratory work, since the space-saving absorber is permanently on ready and does not have to be heated up or otherwise activated each time a new experiment is to be run.

    Your advantages:

    • Cost-saving solution for small-scale laboratory and experimental work
    • Low space requirement – can be integrated into ALD, CVD or similar R&D tools
    • Several accessories available for system upgrade
  • CLEAN-PROTECT
    This trusted safety product has been protecting workplaces and factory neighborhoods at installations around the world for over 30 years. Applicable to a wide range of hazardous gases....

  • Safeguard against emergency gas release

    Hazardous process gases commonly used in the chemical, pharmaceutical, and semiconductor industries are usually supplied from cylinders in an air-extracted cabinet. The CLEAN-PROTECT is designed to absorb toxic or otherwise hazardous gases during a catastrophic gas leakage incident from within a gas cabinet or gas bunker. This trusted safety product has been protecting workplaces and factory neighborhoods at installations around the world for over 30 years.

    Applicable to a wide range of hazardous gases, including: AsH3, BF3, Br2, Cl2, ClF3, COCl2, F2, HCl, HF, HBr, H2S, H2Se, HCN, NH3, N2H4, PH3, SO2.

    Your advantages:

    • High air extract flowrates, protection of multiple gas cabinets
    • Scrubbing capacity for full gas cylinder
    • Low pressure drop
    • Permanently online, practically no maintenance
    • Fully passive – no electrical connections
    • Typical 5 years service life between absorber refills
  • CLEANVENT
    For over 25 years the CLEANVENT cartridge has proven itself a safe solution for the removal of hazardous purge gases....

  • Before a new gas cylinder is put on-line within a gas supply cabinet, process gas remaining from the previous cylinder must first be removed – both for reasons of safety and to ensure integrity of the fresh gas supply. The dead volume of residual gas is likely to be highly concentrated, toxic, pyrophoric, or corrosive, thus posing a considerable safety hazard. For over 25 years the CLEANVENT cartridge has proven itself a safe solution for the removal of hazardous purge gases.

    Your advantages:

    • At-source removal of hazardous vent gases from within gas cabinet or valve manifold box
    • Safe, irreversible conversion of gases to solid by-products at room temperature
    • Cartridges available for over 100 different gases and organometallic precursors
    • Cartridge servicing and refill by specialist local service centers worldwide

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