Wet Physical Processing with intelligent fluids®
Intelligent Fluids GmbH (former Bubbles & Beyond) is the world‘s leading supplier for eco-friendly photo resist strippers and equipment cleaners.While flammable and toxic solvents increasingly lose market acceptance, our water-based, pH-neutral and bio-degradable intelligent fluids® are fully compliant to worldwide EHS regulatory frameworks and gain popularity at global players in semiconductor manufacturing.
Intelligent Fluids® show superior performance in applications such as:
- Metal Lift-Off: A strong and reliable alternative to NMP and DMSO
- Positive/Negative photo resist removal
- Implanted thin film FEOL photo resists as well as >100µm BEOL/BE photo resists
- Coater Catch Cup Cleaning: Fully replacing solvents such as NMP and Acetone
Intelligent fluids ® - Enabling the Post-Solvent Era