► 300mm Standard Load Port
► Compatible with all SEMI compliant FOUPs
► User friendly and functional due to large indicators with selectable FAB-specific configurations
► Reliably working in most of 300mm FABs all over the world with abundant supply reference
► Superior cleanliness due to original design preventing particles from penetrating the FOUP
► Corrosion resistant model available
► Compliant with SEMI, CE and FAB requirements
► Fast and accurate mapping technology (Wafer Presence, Double, Cross detection)
► Thin wafer mapping capability
► Easy to integrate and maintain
► 300mm and 450mm N2 Purge Load Ports
► Prevent cross contamination and surface oxidation
► Moveable purge nozzles allows very reliable placement of the FOUP
► 200mm/300mm AutoSwitch Load Port
► Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
► Automatic Mapping for either wafer size
► Multi-Carrier Universal Load Port
► BOLT-Interface: Exchangeable with 300mm FOUP Load Port
► Multi-Carrier compatible by carrier adapter use
► 150mm/200mm Wafer (SEMI Standard)
► 150mm/200mm FFC (Tape Frame)
► 150mm/200mm Hoop Ring
► Automatic Identification of all above mentioned carriers