KLA-Tencor Corporation

1 Technology Drive
MIlpitas,  CA  95035

United States
http://www.kla-tencor.com
  • Booth: A4407

KLA-Tencor’s comprehensive portfolio of SensArray® products (booth A4407) enables in situ monitoring of process tools’ environments. With wired and wireless sensor wafers and reticles, an automation package and data analysis systems, SensArray® products provide comprehensive information for a wide range of wafer and reticle processes. Wafer process equipment manufacturers, IC manufacturers and reticle manufacturers use SensArray® data to visualize, diagnose and control process conditions


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