Welcome to the "Thin Film Powerhouse"
"Welcome to the Thin Film Powerhouse." Home of the BAK Evaporator and the CLUSTERLINE®, Evatec delivers thin film deposition manufacturing solutions in our core markets of Advanced Packaging, Wireless Communication, Power Devices, Optoelectronics, MEMS and Photonics. We offer platforms with batch, cluster and inline architecture according to customer process and throughput. Visit our booth to hear about the latest developments for our box coaters including new large split chamber systems for large batch production on 200mm. The flexible CLUSTERLINE® family with cluster architecture offer dedicated production solutions on 200 and 300mm formats integrating sputter , PECVD and plasma etch technologies. From the deposition of new high piezoelectric coefficient materials like AlScN in MEMS/ Wireless applications on CLUSTERLINE® 200 II , to high throughput production of TCOs or DBRs for LED applications on CLUSTERLINE® RAD, and high throughput EMI shielding at chip level on SOLARIS ® Evatec delivers the complete production solution.
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