mechatronic systemtechnik Gmbh

Tirolerstrasse 80
Villach,  A-9500

  • Booth: A4661

"Handling Solutions for Non-Standard Wafers"

mechatronic systemtechnik is a successful, fast growing high-tech company headquartered in Villach, Austria. Since 1998 we have been developing specialized machines for handling thin, warped and other critical wafers such as ultrathin, TAIKO, MEMS, film frame, eWLB, Glass used in the semiconductor processing industry.

mechatronic´s fully automated wafer handling (EFEM), packing / unpacking, and sorting and TAIKO ring removing systems are equipped with special end effector, chucks, robots and pre-aligners in order to ensure safe and reliable transport of the even most critical wafers. We are one of the very few companies globally to handle thin and ultra thin wafers both on the chip side and on the backside of the wafer.

mechatronic systemtechnik has a wide product range with perfectly coordinated individual units so that every customer can achieve the ideal solution to its needs – with-out compromise.

mechatronic products:

  • Wafer Packer (mPT series)
  • Wafer Sorter (mWS series)
  • Ring Remover (mRR series)
  • Wafer Handling Tool-EFEM (mWL series)
  • FOUP Loader (mFL Series)

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