Friedrich Ebert Strasse 75
Bergisch Gladbach,  D-51429

  • Booth: A4411

Surface metrology is art. Visit FRT to see for yourself!

FRT offers a comprehensive range of automatable, SEMI compliant 2D and 3D surface measuring systems for the non-destructive investigation of topography, profile, total thickness variation, film thickness, roughness, abrasion and many other properties. More than 500 reputable international companies from the semiconductor, MEMS, optics, photovoltaic and other industries equip their R&D and production departments with FRT metrology systems. FRT operates from Bergisch Gladbach, Germany and maintains subsidiaries in China and the United States. Additionally, FRT provides a distribution and service network in Asia, Europe and USA.


  • MicroProf® 200
    The MicroProf® 200 is the high-performance measuring tool for the non-contact and non-destructive characterization of almost all surfaces and films. It is based on FRT's established multi-sensor technology. All this comes with intuitive and easy handling....

  • MicroProf® 200

    200 mm stand-alone tool

    The MicroProf® 200 is the high-performance measuring device for the non-contact and non-destructive characterization of almost all surfaces and films, and has al­ready been employed successfully by many companies. This surface measuring in­strument is based on FRT´s established multi-sensor technology and is capable of performing numerous measuring tasks within just one system. A high-resolution CWL sensor allows for easy and reliable measuring of, e.g. topography, roughness and contour. With a wide range of additional sensors it is also possible to adapt the MicroProf® 200 optimally and individually to your measuring task. Using the TTV module for inspection from both sides or using the module for automatic sample handling (MHU), the MicroProf® 200 can also be adapted easily to the customer’s new measurement requirements at any time. Simultaneously, the highest automa­tion requirements get fulfilled.

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