Automated CD & Overlay registration measurement system
At INSPECTROLOGY, we have the expertise required to introduce and maintain sucessfully your new automated optical measurement system for critical Dimension and Overlay Registration high TPUT in your facility.
Your IVS200 system will allow the photolithography department to track the performanace of your aligner / stepper / scanners and associated tracks using our high performance image processing software.
Our latest generation IVS200 incorporate a user friendly GUI, on the most cost effective platform to measure from 3" to 8" substrates of all kind including Silicon, GaN, GaAs, LiN, SiC, InP, Glass, Saphire, ....all of the compound semi substrates.
This year, we will welcome you at our Booth to show our capabilities and propose you a DEMO on your substatres if needed.