KITEC microelectronic technologie GmbH

Rennweg 59
Erding,  D-85435

  • Booth: B1139

KITEC - Solutions for equipment automation and metrology.

KITEC microelectronic technologie GmbH was found 1987 specialized in frontend semiconductor equipment, metrology tools and wafer handling systems. We represent and distribute equipment for metrology and wafer handling. Metrology Non contact resistance and thickness measurement systems with wafer mapping and automatic wafer loading for wafer from 2“ up to 300mm. Wafer Handling Automatic batch wafer transfer tools for a wide range of applications including OEM integrations. Single wafer sorters with two load ports tabletop and multistation with integrated OCR reading. Automatic microscope stage loaders including macro inspection and complete visual wafer inspection systems. Automated optical inspection system to detect, analyzed and classification of defects.

Please see us at our booth to discuss your specific requirements.


  • Optical Inspection System
    The system is for visual inspection system for wafer defects. It offers fast qualification and quantification of defects...

  • The system is engineered with versatility in mind. The wafer inspection system has an integrated wafer loader from a cassette including macro inspection option. Each bench-top wafer loader can handle a wide variety of wafer sizes and easily integrate with other machines. The full automated version of wafer inspection system can analyzes different wafer´s material. With multiple magnifications the system can fully characterize defect´s frequency and type. End effectors are customized to fit any customer application.

  • Little Tools
    Handy and easy to use tools to help the day to day operation with small footprint....

  • Tools example:

    • Vacuum wafer wands and tips with spiral hose and a table or wall mounted holders. Also battery operated with handy design and low weight.
    • Universal flat aligner for manual operated or automated; can be adapt to different carriers
    • Automatic notch/flat finder with selection of  up or down alignment, both with ESD protection
    • Manual notch/flat finder, with ESD protection for conductive carrier
    • Stair step lifter with LED viewing light presents the wafer IDs for visual reading
    • Cascade wafer presenter automatically aligns and lifts the wafers
    • 150mm aligner / counter is the combination of an automatic flat aligner and mapping function to count the number of wafers in a cassette
    • Metall cassette or quartz boat
  • nSpec - automatic optical inspection system
    The system has been developed to meet the requirement of applications with the difference to other systems e.g. quality control. The system uses image processing to determine defects & possible capability to separate particles and other kinds of defects....

  • nSPEC® is a fully automated, optical micro wafer inspection system for analyzing opaque, semi-transparent and transparent wafer for defect. The wafer inspection system offers fast qualification and quantification of defects with reporting and mapping.

    The  defect inspection system nSpec is not only able to detect, but alto analyze and classification artifacts. The system works with complex image processing and IA. This gives you the possibility to save the image and analyze when it is necessary.

    This tool also can inspect substrate wafers, processed wafer with EPI layers or structured wafer. For the analyzing process are different filters, objective with BF, DF and DIC and lightning with different colour available. You can create complex receipt for different applications.  

    Furthermore there is a setting for single image capture or scan. Wafer sizes, type of defects to be identified and scan resolution are the configurations options. nSPEC® use the highest quality optics from the market leaders in microscopy. Lightning and high-resolution camera captures the image and then analyzes it. The software is intuitive and can control all aspect of measurement, e.g. the focus, specimen movement, lightning and objective selection.

  • nPlace Marco
    nPlace Marco is a rapid automated inspection system for defects from 50µm to 100µm....

  • nPlace Marco incorporate a wafer loader that meets industry- standard demands.

    The system can handle wafer sizes from 50mm up to 200. For the analyzing process there are different illumination modes like darkfield, brightfield, oblique and orthogonal to help detect artifacts.

    Nanotronics uses different kinds of end effector that load wafers individual. Each end effector is conceived according to the customer´s needs. You can create receipt for different kinds of application.

  • Batch Wafer Handling System – Comet & Gemini
    Batch wafer transfer system available with one (1) up to three (3) stations and handle different wafer sizes and wafer thickness - depending from model. Systems are available aligner for notch and flat....

  • The Comet batch wafer transfer systems are produced by R2D Automation. The handling is manipulation and stress free and based on gravity. These systems are for application of wafers from 3“ up to 8“ and also 300mm. The tool can transfer wafer from carrier to carrier or boat and back. Automatic and semi-automatic handling processes like simple wafer transfers 1:1, back to back, merge and split batch are possible.

    All models are fast, clean, reliable and accurate. The systems from R2D Automation are customizable for your different boats and carrier and compatible with your communication requirements. Operating – with one button system – is simple as well as the maintenance. ESD models are available.

    Gemini – one of the world smallest batch transfer system can be use anywhere in the Fab, replacing conventional horizontal pushers for a safety transfer.

  • MuTauScan
    CONTACTLESS RESISTIVITY & CHARGE CARRIER MOBILITY LIFETIME MAPPING OF HIGH RESISTIVITY SEMICONDUCTOR WAFERS. The MuTauSCAN is a high performance instrument for the characterization of high resistivity semiconductor wafers....

  • The instrument integrates automatically full wafer mapping of both :
    * Resistivity

    * Charge Transport properties

    It can be delivered in
    two configurations depending on the resistivity range of interest :
    * resistivities in the range 10
    5 to 108 W cm, for materials like GaAs or InP …
    * resistivities from 10
    6 to 1011 W cm for GaN , CdTe , CZT , SiC …

    MuTauScan uses a contactless methods for material characterisation, i.e. avoiding
    the problems connected with the fabrication of ohmic contacts for test evaluation, it allows the
    examination of wafers without degrading surface quality.


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