nSPEC® is a fully automated, optical micro wafer inspection system for analyzing opaque, semi-transparent and transparent wafer for defect. The wafer inspection system offers fast qualification and quantification of defects with reporting and mapping.
The defect inspection system nSpec is not only able to detect, but alto analyze and classification artifacts. The system works with complex image processing and IA. This gives you the possibility to save the image and analyze when it is necessary.
This tool also can inspect substrate wafers, processed wafer with EPI layers or structured wafer. For the analyzing process are different filters, objective with BF, DF and DIC and lightning with different colour available. You can create complex receipt for different applications.
Furthermore there is a setting for single image capture or scan. Wafer sizes, type of defects to be identified and scan resolution are the configurations options. nSPEC® use the highest quality optics from the market leaders in microscopy. Lightning and high-resolution camera captures the image and then analyzes it. The software is intuitive and can control all aspect of measurement, e.g. the focus, specimen movement, lightning and objective selection.