Agileo Automation

11 rue Victor GRIGNARD
POITIERS,  F-86000

  • Booth: B1265

Software and robotics solutions for semiconductor equipments

Software and robotics solutions for semiconductor equipments

Agileo Automation specializes in industrial automation with a high expertise in software services for semiconductor and photovoltaic equipment manufacturers.

With 10+ years experience in semiconductor equipment automation (process equipment, wafer handlers, reticle handlers), Agileo Automation supports its customer from equipment design through customer acceptance.


  • A²ECF - Equipment Controller Framework
    Software solution for equipment automation with SEMI standards compliance<br />Robotics wafer loader management, Wafer Scheduling, SECS/GEM interface...

  • Connect your equipment to the Fab and manage robotics wafer loader (EFEM) to be ready for mass production.

    With A²ECF V4 :

    • Be in the right “time to market” and Reduce software investments by using existing software solution with documented architecture
    • Focus on your core business: With built-in SEMI standards compliance and major robotics platform supported, Agileo Automation takes care of your equipment automation
    • Increase the maintainability and the testability of your equipment software: Standardization of hardware and software simulation for off-site problem analysis and off-line host integration
    • Partner with a team able to support you from RFQ answering to worldwide equipment commissioning
    • Get prepared to your customers’ future needs: 6”, 8”, 300mm and 450mm compliance based on the same architecture, open to new hardware and following industry standards with planned updates.

    Technical details:

    • Many robotics platforms supported
    • Create your business logic based on models
    • Based on widely spread technologies (Microsoft Visual Studio.NET®)
    • Rapid and professional user interface
    • Ready for SECS/GEM integration

    More details here

  • SECS/GEM driver
    Agileo Automation SECS/GEM driver provides a software device encapsulating SEMI standards which are required to establish communication with a Fab Host (MES)...

  • GEM Services
    • Equipment communication state
    • and control state
    • Process program
    • Collection event sending (S6F11)
    • Variable data collection
    • Status data collection
    • Remote control (S2F42/S2F49)
    • Alarm management
    • Equipment constants
    • Clock
    • Trace data collection
    • Limits monitoring
    • Customization availability for any SECS-II compliant message format
    Supported SEMI standards
    • E4 SECS-I (serial protocol)
    • E37 HSMS-SS (ethernet protocol)
    • E5 SECS-II
    • E30 GEM

    More details here

  • Speech Scenario
    Host or Equipment emulator for virtual commissioning and Automate SECS/GEM regression testing...

  • Simulate the Fab host to automatically validate a SECS/GEM tool before shipping an equipment (FAT) or at reception (SAT)

    Improve overall equipment software quality

    Be confident in software modifications


    • Receive and Send any SECS-II compliant message (including E40, E94, E87,…)
    • Benefit from standard scenarios
    • Write your own testing scenarios in C#, interact with the tool GUI
    • Provide logs in SMN (E173 SEMI standard) or SML prior to tool shipment
    • Can be either Host or Equipment
    • Continuous integration: execute scenarios on a Build Server with console mode
    Technical details
    • Native .Net application
    • Based on Agileo Automation’s field-proven  SECS-I, SECS-II and HSMS drivers
    • Run on Microsoft® Windows® 7 x86 and x64, Microsoft® Windows® 10 x64

    More details here

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".