Faeth GmbH

Schwabacher Str, 10
Klipphausen,  D-01665

  • Booth: B1561

Competence in High Purity

As a family-run business operating globally, the Faeth Group companies are worldwide leader in the development, manufacturing, installation, qualification and analytics of gas and chemical supply systems. Combined with the ability to produce individual, customer-specific as well as OEM (Original Equipment Manufacturer) solutions, the company has earned a strong reputation in the semiconductor, photovoltaic and LED industries.

Founded in 2004, the Faeth Group has more than 350 employees worldwide. 


  • GasServant-800
    GasServant-800 by Faeth Group is a fully automated supply system for emptying from cylinders with liquefied and compressed gases. The redundant design allows a continuous gas flow and automatic switch over between both supply lines....

  • Continuous monitoring of all process parameters guarantees maximum
    supply reliability. The cylinder connection via 3-way-purge-blocks and
    an implemented purge program allow highest degree of safety for the
    operator – with lowest purge gas consumption at the same time. Safety
    features to protect against leaks, overpressure and fire hazard guarantee
    maximum safety for personnel and infrastructure. By being made in
    Germany and using high-quality components, our gas cabinet achieves
    the highest quality standards.

    Technical Data
    Material 316L Stainless steel
    Surface roughness ≤ 0.25 Ra μm Ave.
    Helium leak test
    Leak rate (inside)
    < 1 x 10-9 scc/s
    Particle test ≤ 0.1 μm size: 5 ptc/ft3
    > 0.3 μm size: 0 ptc/ft3
    Moisture < 10 ppb
    Oxygen < 10 ppb
    Dimensions W 800 x D 591x H 2280 (mm)


    • 4VCR®-connection / Orbital welded
    • 4Operation via touchpanel Siemens TP900
    • 4Exhaust monitoring
    • 4Pre- and fine filter
    • 4Clean room assembled (ISO 6)
    • 4Service ports for maintenance and tests

    Tests and qualification

    The following tests were done on the whole system
    • 4Pressure test
    • 4Helium leak test
    • 4Particle test (optional)
    • 4Moisture test (optional)
    • 4Oxygen test (optional)


    • 4CE conformity
    • 4TRGS
    • 4EIGA
    • 4ATEX 2014/34/EU (optional)
    • 4SEMI-Standards (optional)

    Optional components

    • 4Vacuum generator
    • 4Height adjustable cylinder mounting
    • 4Cleaning cartridge
    • 4Rupture disk
    • 4Cylinder scales for liquified gases
    • 4Flame detection
    • 4Gas detection
    • 4Cylinder-, panel- and processline heating

  • Chemical supply systems

  • Faeth Group develops, manufactures and installs complete chemical
    supply systems in modular construction. Our product range
    also provides single components for all kinds of processes involving
    mixture and supply of chemicals, slurrys and solvents. Our systems
    are characterised by their maintenance-friendly instrumentation.
    All modules are equipped with proven, low-wear components.

    Our production range for Chemical supply systems includes:

    • 3D-based concepts for planning and manufacturing
    • Installations for bulk and process chemicals
    • Optimised pipe-work layout planning
    • Pipes installed using proven double containment system
    • Redundant integration of important system components
    • PLC-based and fully automatic control and testing systems
    • Prefabrication and complete fabrication of pipe-work
    and distribution systems
    • Optimisation and reconstruction of existing plants

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